Synchrotron radiation photoelectron spectroscopy and near-edge X-ray absorption fine structure study on oxidative etching of diamond-like carbon films by hyperthermal atomic oxygen

Applied Surface Science

Volumn 256, Issue 24, 2010, Pages 7678-7683

  Tagawa, Masahito ^a   Yokota, Kumiko ^a   Kitamura, Akira ^a   Matsumoto, Koji ^b   Yoshigoe, Akitaka ^c   Teraoka, Yuden ^c   Kanda, Kazuhiro ^d   Niibe, Masahito ^d  

^a KOBE UNIVERSITY   (Japan)

^b JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^c JAPAN ATOMIC ENERGY AGENCY   (Japan)

^d UNIVERSITY OF HYOGO   (Japan)

Author keywords

Atomic oxygen; Diamond like carbon; Hydrogen; NEXAFS; RBS

Indexed keywords

ATOMS; CARBON FILMS; DIAMONDS; ETCHING; HYDROGEN; OXYGEN; PHOTOELECTRONS; PHOTONS; RUBIDIUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SYNCHROTRON RADIATION; SYNCHROTRONS; X RAY ABSORPTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC OXYGEN; DIAMOND LIKE CARBON; HYPERTHERMAL ATOMIC OXYGEN; NEAR EDGE X RAY ABSORPTION FINE STRUCTURE; NEAR-EDGE X-RAY ABSORPTION FINE STRUCTURE STUDIES; NEXAFS; SURFACE STRUCTURAL CHANGES; SYNCHROTRON RADIATION PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 77955422328     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.06.030     Document Type: Article

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