From DLC to Si-DLC based layer systems with optimized properties for tribological applications

Surface and Coatings Technology

Volumn 215, Issue , 2013, Pages 357-363

  Hofmann, D ^a   Kunkel, S ^a   Bewilogua, K ^b   Wittorf, R ^b  

^a AMG Coating Technologies GmbH   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

DLC; Hydrogen; Magnetron; Si DLC; Thermal stability

Indexed keywords

COEFFICIENT OF FRICTIONS; DIAMOND-LIKE CARBON COATINGS; DLC; DRY CONDITION; FRICTION COEFFICIENTS; GRAPHITE TARGET; HIGH WEAR RESISTANCE; HYDROGEN CONCENTRATION; HYDROGEN CONTENTS; INDENTATION HARDNESS; MAGNETRON SPUTTER; OPERATIONAL TEMPERATURE; PRODUCTION METHODS; SI-DLC; SILICON CONCENTRATION; TARGET CONFIGURATIONS; TRIBOLOGICAL APPLICATIONS; VALVETRAIN;

COATINGS; FRICTION; HYDROGEN; INDUSTRIAL APPLICATIONS; MAGNETRON SPUTTERING; MAGNETRONS; THERMODYNAMIC STABILITY; WEAR RESISTANCE;

SILICON;

EID: 84872680626     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.06.094     Document Type: Article

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