Characterization of coating probe with Ti-DLC for electrical scanning probe microscope

Applied Surface Science

Volumn 257, Issue 16, 2011, Pages 7238-7244

  Shia, Xiaolei ^a   Guo, Liqiu ^a   Bai, Yang ^a   Qiao, Lijie ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Electrical conductivity; Magnetron sputtering; Probe; Ti DLC films; Wear resistance

Indexed keywords

COATINGS; ELECTRIC CONDUCTIVITY; ELECTRIC CONDUCTIVITY MEASUREMENT; IMAGE QUALITY; MAGNETRON SPUTTERING; NANOCANTILEVERS; PROBES; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

COATING MATERIAL; CONDUCTIVE PROBE; DLC FILM; DLC THIN FILMS; ELECTRICAL CONDUCTIVITY; ELECTRICAL SCANNING; MORPHOLOGY AND COMPOSITION; SILICON CANTILEVER;

WEAR RESISTANCE;

EID: 79955604501     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.03.099     Document Type: Article

References (18)

1. E.B. Cooper, S.R. Manalis, H. Fang, H. Dai, K. Matsumoto, S.C. Minne, T. Hunt, and C.F. Quate Appl. Phys. Lett. 75 1999 3566
2. M.H. Chen, M. Li, C.L. Brosseau, and J. Lipkowski AFM studies of the effect of temperature and electric field on the structure of a DMPC-cholesterol bilayer supported on a Au(1 1 1) electrode surface Langmuir vol.25 no.2. 2009
3. W. brezna, S. Harasek, E. bertagnolli, E. Gornik, J. Smoliner, and H. Enichlmair J. Appl. Phys. 92 2002 2144
4. E. Finot, E. Lesniewska, J.-P. Goudonnet, and J.-C. Mutin Mapping the influence of stress on the surface elasticity with an atomic force microscope Appl. Phys. Lett. 73 1998 2938 2940 (Pubitemid 128674192)
5. P. Mazur, S. Zuber, M. Grodzicki, and A. Ciszewski Morphology and electric conductance of ultra-thin Cr contacts on 6H-SiC(0001): AFM and current-sensing AFM study Vacuum 82 4 2007
6. Binning G, Rohrer H. Scanning Tunneling Microscope. Patent: US 4343993 (1982).
7. J.I. Paredes, A. Martinez-Alonsu, and J. Tascon Micropor. Mesopor. Mater. 65 2003 93 126
8. B. Ebersberger, A. Olbrich, and C. Boil Microelectron. Reliab. 41 2001 1449 1458
9. T.R. Albrecht, and M.M. Dovek Imagine and modificaion of polymers by scanning tunneling and atomic force microscopy J Appl Phys 64 3 1988 1178 1184
10. A.H. Sorensen, U. Hvid, M.W. Mortensen, and K.A. Morch Rev. Sci. Instrum. 70 1999 3059
11. Ph. Niedermann, W. Hanni, D. Morel, A. Perret, N. Skinner, P.F. Indermuhle, N.F. de Rooij, and P.A. Buffat Appl. Phys. A 66 1998 31
12. Y.T. Kim, S.M. Cho, W.S. Choi, B. Hong, and D.H. Yoon. Dependence of the bonding structure of DLC thin films on the deposition conditions of PECVD method Surf. Coat. Technol. 169-170 2003 291 294 (Pubitemid 36708794)
13. L.-Y. Huang, J. Lu, and K.-W. Xu Investigation of the relation between structure and mechanical properties of hydrogenated diamond-like carbon coatings prepared by PECVD Mater. Sci. Eng. A 373 2004 45 53 (Pubitemid 38662391)
14. W.S. Choi, J. Heo, I. Chung, and B. Hong The effect of RF power on tribological properties of the diamond-like carbon films Thin Solid Films 475 2005 287 290 (Pubitemid 40206329)
15. W.J. Yang, Y.-H. Choa, T. Sekino, F.B. Shim, K. Niihara, and K.H. Auh Structural characteristics of diamond-like nanocomposite films grown by PECVD Mater. Lett. 57 2003 3305 3310
16. S. Yang, S. Li, N.M. Renevier, Tribological properties and wesr mechanism of sputtered C/Cr coating, 2001.
17. R.J. Narayan, Laser processing of diamond-like oarhnn-metal composites (2005) 1-4.
18. C. Liu, G. Li, W. Chen, Z. Mu, C. Zhang, and L. Wang The study of doped DLC films by Ti ion implantation Thin Solid Films 475 2005 279 282