Characterization of hard diamond-like carbon films formed by Ar gas cluster ion beam-assisted fullerene deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 B, 2002, Pages 4295-4298

  Kanda, Kazuhiro ^a,d   Kitagawa, Teruyuki ^a   Shimizugawa, Yutaka ^a   Haruyama, Yuichi ^a   Matsui, Shinji ^a   Terasawa, Mititaka ^b   Tsubakino, Harushige ^c   Yamada, Isao ^b   Gejo, Tatsuo ^a   Kamada, Masao ^c  

^a UNIVERSITY OF HYOGO   (Japan)

^b KYOTO UNIVERSITY   (Japan)

^c INSTITUTE FOR MOLECULAR SCIENCE   (Japan)

^d SAGA UNIVERSITY   (Japan)

Author keywords

Diamond like carbon thin film; Fullerene; Gas cluster ion beam assisted deposition; Nano indentation; Near edge X ray absorption fine structure spectroscopy

Indexed keywords

ABSORPTION SPECTROSCOPY; ARGON; CRYSTAL ATOMIC STRUCTURE; ELECTRON TRANSITIONS; FULLERENES; HARDNESS; INDENTATION; ION BEAM ASSISTED DEPOSITION; SYNCHROTRON RADIATION; THIN FILMS; X RAY ANALYSIS;

ELECTRON EXCITATION ENERGIES; NANO-INDENTATIONS;

DIAMOND LIKE CARBON FILMS;

EID: 0036614352     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4295     Document Type: Article

References (10)