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Japanese Journal of Applied Physics

Volumn 50, Issue 5 PART 1, 2011, Pages

Effect of the soft X-rays on highly hydrogenated diamond-like carbon films

(6) Kanda, Kazuhiro a Yokota, Kumiko b Tagawa, Masahito b Tode, Mayumi c Teraoka, Yuden c Matsui, Shinji a

a UNIVERSITY OF HYOGO (Japan)

b KOBE UNIVERSITY (Japan)

c JAPAN ATOMIC ENERGY AGENCY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION OF HYDROGEN; DIAMOND-LIKE CARBON; DLC FILM; ETCHING PROCESS; ETCHING RATE; ETCHING RATIO; HYDROGEN CONTENTS; HYDROGEN DESORPTION; IN-VACUUM; MODIFIED SURFACES; SOFT X-RAY;

DESORPTION; DIAMOND LIKE CARBON FILMS; DIAMONDS; ETCHING; HYDROGEN; HYDROGENATION; IRRADIATION; SUN; SYNCHROTRON RADIATION; VACUUM; X RAY LITHOGRAPHY;

CARBON FILMS;

EID: 79957587062 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.50.055801 Document Type: Article

Times cited : (12)

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