Comprehensive classification of DLC films formed by various methods using NEXAFS measurement

Diamond and Related Materials

Volumn 17, Issue 7-10, 2008, Pages 1743-1745

  Saikubo, Akihiko ^a,b   Yamada, Noriko ^a,b   Kanda, Kazuhiro ^a,b   Matsui, Shinji ^a,b   Suzuki, Tsuneo ^b   Niihara, Koichi ^b   Saitoh, Hidetoshi ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Diamond like carbon thin film; Elastic recoil detection analysis; Near edge X ray absorption fine structure; Structural analysis; X ray reflectivity

Indexed keywords

CARBON FILMS; DIAMOND FILMS; DIAMONDS; ELECTRIC LOAD MANAGEMENT; STRUCTURAL ANALYSIS;

DIAMOND-LIKE CARBON THIN FILM; DLC FILMS; ELASTIC RECOIL DETECTION ANALYSIS; NEAR-EDGE X-RAY ABSORPTION FINE STRUCTURE; X-RAY REFLECTIVITY;

DIAMOND LIKE CARBON FILMS;

EID: 48849101545     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.01.095     Document Type: Article

References (11)

1. Ferrari A.C., and Robertson J. Phys. Rev., B 61 (2000) 14095
2. Edamatsu K., Tanaka Y., Yokokawa T., Seki K., Tohnan M., Okada T., and Ohta T. Jpn. J. Appl. Phys. 30 (1991) 1073
3. Gutiérrez A., Díaz J., and López M.F. Appl. Phys. A 61 (1995) 111
4. Lenardi C., Piseri P., Briois V., Bottani C.E., Li Bassi A., and Milani P. J. Appl. Phys. 85 (1999) 7159
5. Díaz J., Anders S., Zhou X., Moler E.J., Kellar S.A., and Hussain Z. J. Elect. Spectrosc. Rel. Phenom. 101-103 (1999) 545
6. Berger S.D., McKenzie D.R., and Martin P.J. Philos. Mag. Lett. 57 (1988) 285
7. Fallon P.J., and Brown L.M. Diamond Relat. Mater. 2 (1993) 1004
8. Robertson J. Material. Sci. Eng., R 37 (2002) 129
9. Batson P.E. Phys. Rev., B 48 (1993) 2608
10. Ohkawara Y., Ohshio S., Suzuki T., Ito H., Yatsui K., and Saitoh H. Jpn. J. Phys. 40 (2001) 7007
11. Ohkawara Y., Ohshio S., Suzuki T., Ito H., Yatsui K., and Saitoh H. Jpn. J. Appl. Phys. 40 (2001) 3359