A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation

Applied Surface Science

Volumn 258, Issue 7, 2012, Pages 3045-3050

  Ma, Guojia ^a,b   Gong, Shuili ^b   Lin, Guoqiang ^a   Zhang, Lin ^a   Sun, Gang ^b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b AVIC Manufacturing Technology Institute   (China)

Author keywords

Adhesion; DLC; Hydrophobic property; Ion implantation; Ti doping

Indexed keywords

ADHESION; CARBON FILMS; CONTACT ANGLE; DIAMOND LIKE CARBON FILMS; ION IMPLANTATION; MAGNETRON SPUTTERING; SEMICONDUCTOR DOPING; TITANIUM ALLOYS;

COHESIVE STRENGTH; FRICTIONAL WEAR; HYDROPHOBIC PROPERTIES; NANOMETER GRAINS; REACTIVE MAGNETRON SPUTTERING; STRUCTURE AND PROPERTIES; TI DOPING; WATER CONTACT ANGLE;

WEAR RESISTANCE;

EID: 84862946235     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.11.034     Document Type: Article

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