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Volumn 22, Issue 11, 2013, Pages

Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE (ALN); CMOS COMPATIBLE; CRYSTALLINITIES; CYTOTOXICITY TESTING; MEMS APPLICATIONS; PIEZOELECTRIC PROPERTY; POLYIMIDE FILM; SEMICRYSTALLINES;

EID: 84887110653     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/22/11/115033     Document Type: Article
Times cited : (101)

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