Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance

Journal of Micromechanics and Microengineering

Volumn 23, Issue 7, 2013, Pages

  Jackson, Nathan ^a   O'Keeffe, Rosemary ^a   Waldron, Finbarr ^a   O'Neill, Mike ^b   Mathewson, Alan ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b ANALOG DEVICES   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE (ALN); ALUMINUM NITRIDE CRYSTALS; CMOS COMPATIBILITY; ENERGY HARVESTING DEVICE; FABRICATION PROCESS; ORIENTATION DEPENDENCIES; PIEZOELECTRIC CONSTANT; VIBRATIONAL ENERGY HARVESTING;

ALUMINUM NITRIDE; CRYSTAL ORIENTATION; PIEZOELECTRICITY;

ENERGY HARVESTING;

EID: 84879767316     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/7/075014     Document Type: Article

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