Sensitivity enhancement in diaphragms made by aluminum nitride thin films prepared on polyimide films

Applied Physics Letters

Volumn 92, Issue 4, 2008, Pages

  Akiyama, Morito ^a   Morofuji, Yukari ^a   Nishikubo, Keiko ^a   Kamohara, Toshihiro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; POLYIMIDES; SENSITIVITY ANALYSIS; SPUTTER DEPOSITION; SUPERALLOYS; THIN FILMS;

C -AXIS ORIENTATION; PIEZOELECTRIC COEFFICIENT; SENSITIVITY ENHANCEMENT;

DIAPHRAGMS;

EID: 38849169031     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2839319     Document Type: Article

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