Nonhermetic encapsulation materials for mems-based movable microelectrodes for long-term implantation in the brain

Journal of Microelectromechanical Systems

Volumn 18, Issue 6, 2009, Pages 1234-1245

  Jackson, Nathan ^a   Anand, Sindhu ^a   Okandan, Murat ^b   Muthuswamy, Jit ^a  

^a Arizona State University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Bio microelectromechanical systems (MEMS); Composite; Neural implant; Neural prostheses; Packaging; Reliability

Indexed keywords

BIOMICROELECTROMECHANICAL SYSTEMS; NEURAL IMPLANT; NEURAL IMPLANTS; NEURAL PROSTHESES; NEURAL PROSTHESIS;

BIOCOMPATIBILITY; DEBRIS; FORCE MEASUREMENT; GELS; INFRARED SPECTROSCOPY; MATERIALS; MATERIALS TESTING; MECHATRONICS; MEMS; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; POLYAMIDES; POLYIMIDES; PROSTHETICS; RAYON; SILICONES; SURFACE DEFECTS; VISUAL COMMUNICATION;

COMPOSITE MICROMECHANICS;

EID: 71549129569     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2030075     Document Type: Article

References (35)

1. T. Harpster, S. Nikles, M. Dokmeci, and K. Najafi, "Long-term her-meticity and biological performance of anodically bonded glass-silicon implantable packages," IEEE Trans. Device Mater. Rel., vol.5, no.3, pp. 458-466, Sep. 2005.
2. K. Cheung, K. Djupsund, Y. Dan, and L. Lee, "Implantable multichannel electrode array based on SOI technology," J. Microelectromech. Syst., vol.12, no.2, pp. 179-184, Apr. 2003.
3. K.-K. Lee, J. He, A. Singh, S. Massia, G. Ehteshami, B. Kim, and G. Raupp, "Polyimide-based intracortical neural implant with improved structural stiffness," J. Micromech. Microeng., vol.14, no.1, pp. 32-37, Jan. 2004.
4. K. Moxon, N. Kalkhoran, M. Markert, M. Sambito, J. L. McKenzie, and J. Webster, "Nanostructured surface modification of ceramic-based microelectrodes to enhance biocompatibility for a direct brain-machine interface," IEEE Trans. Biomed. Eng., vol.51, no.6, pp. 881-889, Jun. 2004.
5. C. Nordhausen, E. Maynard, and R. Normann, "Single unit recording capabilities of a 100 microelectrode array," Brain Res., vol. 726, no. 1/2, pp. 129-140, Jul. 1996.
6. P. Norlin, M. Kindlundh, A. Mouroux, K. Yoshida, and U. Hofmann, "A 32-site neural recording probe fabricated by DRIE of SOI substrates," J. Micromech. Microeng., vol.12, no.4, pp. 414-419, Jul. 2002.
7. R. Vetter, J. Williams, J. Hetke, E. Nunamaker, and D. Kipke, "Chronic neural recording using silicon-substrate microelectrode arrays implanted in cerebral cortex," IEEE Trans. Biomed. Eng., vol.51, no.6, pp. 896-904, Jun. 2004.
8. K. Wise, D. Anderson, J. Hetke, D. Kipke, and K. Najafi, "Wireless im-plantable microsystems: High-density electronic interfaces to the nervous system," Proc. IEEE, vol.92, no.1, pp. 76-97, Jan. 2004.
9. T. Becker and D. Kipke, "Algel as dural sealant, determination of effects on the sensorimotor cortex in rats," in Proc. 25th Annu. Int. Conf. IEEE EMBS, 2003, pp. 1972-1975.
10. J. Cham, E. Branchaud, Z. Nenadic, B. Greger, R. Anderson, and J. Burdick, "Semi-chronic motorized microdrive and control algorithm for autonomously isolating and maintaining optimal extracellular action potentials," J. Neurophysiol., vol.93, no.1, pp. 570-579, Jan. 2005.
11. S. Park, E. Yoon, S. Lee, H.-S. Shin, H. Park, B. Kim, D. Kim, J. Park, and S. Park, "The development of a PZT-based microdrive for neural signal recording," Smart Mater. Struct., vol.17, no.2, pp. 1-7, Apr. 2008.
12. T. Sato, T. Suzuki, and K. Mabuchi, "A new multi-electrode array design for chronic neural recording, with independent and automatic hydraulic positioning," J. Neurosci. Methods, vol.160, no.1, pp. 45-51, Feb. 2007.
13. J. Keating and G. Gerstein, "A chronic multi-electrode microdrive for small animals," J. Neurosci. Methods, vol.117, no.2, pp. 201-206, Jun. 2002.
14. A. Nichols, T. Ruffner, M. Sommer, and R. Wurtz, "A screw microdrive for adjustable chronic unit recording in monkeys," J. Neurosci. Methods, vol. 81, no. 1/2, pp. 185-188, Jun. 1998.
15. J. Muthuswamy, M. Okandan, A. Gilletti, M. Baker, and T. Jain, "An array of microactuated microelectrodes for monitoring single-neuronal activity in rodents," IEEE Trans. Biomed. Eng., vol.52, no.8, pp. 1470-1477, Aug. 2005.
16. J. Muthuswamy, M. Okandan, T. Jain, and A. Gilletti, "Electrostatic microactuators for precise positioning of neural microelectrodes," IEEE Trans. Biomed. Eng., vol.52, no.10, pp. 1748-1755, Oct. 2005.
17. C. Pang, Y.-C. Tai, J. Burdick, and R. Anderson, "Electrolysis-based parylene balloon actuators for movable neural probes," in Proc. 2nd IEEE Int. Conf. Nano/Micro Eng. Mol. Syst., Bangkok, Thailand, 2007, pp. 913-916.
18. N. Jackson, P. Stice, M. Okandan, and J. Muthuswamy, "Long-term cortical recordings with microactuated microelectrodes," in Proc. 3rd Int. IEEE EMBS Conf. Neural Eng., Kohala Coast, HI, 2007, pp. 141-143.
19. N. Jackson and J. Muthuswamy, "Artificial dural sealant that allows multiple penetrations of implantable brain probes," J. Neurosci. Methods, vol.171, no.1, pp. 147-152, Jun. 2008.
20. C. Adams, K. Mathieson, D. Gunning, W. Cunningham, M. Rahman, J. D. Morrison, and M. L. Prydderch, "Development of flexible arrays for in vivo neuronal recordings and stimulation," Nucl. Instrum. Methods Phys. Res. A, Accel. Spectrom. Detect. Assoc. Equip., vol. 546, no. 1/2, pp. 154-159, Jul. 2005.
21. Z. Yu, C. Tsay, S. Lacour, S. Wagner, and B. Morrision, "Stretchable microelectrode arrays: A tool for discovering mechanisms of functional deficits underlying traumatic brain injury and interfacing neurons with neuroprosthetics," in Proc. 28th Annu. Int. Conf. IEEE EMBS, New York, NY, 2006, pp. 6732-6735.
22. N. Jackson and J. Muthuswamy, "Flexible chip-scale package and interconnect for implantable MEMS movable microelectrode for the brain," J. Microelectromech. Syst., vol.18, no.2, pp. 396-404, Apr. 2009.
23. J.-U. Meyer, T. Stieglitz, O. Scholz, W. Haberer, and H. Beutel, "High density interconnects and flexible hybrid assemblies for active biomed-ical implants," IEEE Trans. Adv. Packag., vol.24, no.3, pp. 366-374, Aug. 2001.
24. K. Cheung, P. Renaud, H. Tanila, and K. Djupsund, "Flexible polyimide microelectrode array for in vivo recordings and current source density analysis," Biosens. Bioelectron., vol.22, no.8, pp. 1783-1790, Mar. 2007.
25. T. Stieglitz, "Flexible biomedical microdevices with double-sided electrode arrangements for neural applications," Sens. Actuators A, Phys., vol.90, no.3, pp. 203-211, May 2001.
26. D. Feili, M. Schuettler, T. Doerge, S. Kammer, K. Hoffmann, and T. Stieglitz, "Flexible organic field effect transistors for biomedical mi-croimplants using polyimide and parylene C as the substrate and insulator layers," J. Micromech. Microeng., vol.16, no.8, pp. 1555-1561, Aug. 2006.
27. Y. Sun, S. Lacour, R. Brooks, N. Rushton, J. Fawcett, and R. Cameron, "Assessment of the biocompatibility of photosensitive polyimide for im-plantable medical device use," J. Biomed. Mater. Res. A, vol.90A, no.3, pp. 648-655, Sep. 2009.
28. M. Chiao and L. Lin, "Hermetic wafer bonding based on rapid thermal processing," Sens. Actuators A, Phys., vol.91, no.3, pp. 398-402, Jul. 2001.
29. M. Chiao and L. Lin, "Device-level hermetic packaging of micro-resonators by RTP aluminum-to-nitride bonding," J. Microelectromech. Syst., vol.15, no.3, pp. 515-522, Jun. 2006.
30. S. Lorenzl, U. Koedel, and H.-W. Pfister, "Mannitol, but not allopurinol, modulates changes in cerebral blood flow, intracranial pressure, and brain water content during pneumococcal meningitis in the rat," Crit. Care Med., vol.24, no.11, pp. 1874-1880, Nov. 1996.
31. B. Mokri, S. F. Hunter, J. L. D. Atkinson, and D. G. Piepgras, "Orthostatic headaches caused by CSF leak but with normal CSF pressures," Neurology, vol.51, no.3, pp. 786-790, Sep. 1998.
32. M. Preul, W. Bichard, T. Muench, and R. Spetzler, "Toward optimal tissue sealants for neurosurgery: Use of a novel hydrogel sealant in a canine durotomy repair model," Neurosurgery, vol.53, no.5, pp. 1189-1199, Nov. 2003.
33. D. Szarowski, M. Andersen, S. Retterer, A. Spence, M. Isaacson, H. Craighead, J. Turner, and W. Shain, "Brain responses to micro-machined silicon devices," Brain Res., vol. 983, no. 1/2, pp. 23-35, Sep. 2003.
34. A. Jourdain, P. De Moor, K. Baert, I. De Wolf, and H. Tilmans, "Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-)MEMS devices," J. Micromech. Microeng., vol.15, no.7, pp. S89-S96, Jul. 2005.
35. D. Zealear, K. Garren, R. Rodriguez, J. Reyes, S. Huang, M. Dokmeci, and K. Najafi, "The biocompatibility, integrity, and positional stability of an injectable microstimulator for reanimation of the paralyzed larynx," IEEE Trans. Biomed. Eng., vol.48, no.8, pp. 890-897, Aug. 2001.