SCOPUS 정보 검색 플랫폼

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2012, Pages 50-54

A diaphragm based piezoelectric AlN film quality test structure

(6) Jackson, Nathan a O'Keeffe, Rosemary a O'Leary, Robert a O'Neill, Mike b Waldron, Finbarr a Mathewson, Alan a

a UNIVERSITY COLLEGE CORK (Ireland)

b ANALOG DEVICES (Ireland)

Author keywords

Aluminum nitride; Di aphragm; MEMS; Piezoelectrics

Indexed keywords

ALN; ALN FILMS; BULK-MICROMACHINED; CMOS PROCESSING; DEPOSITION PROCESS; MATERIAL CHARACTERIZATIONS; PIEZOELECTRIC PROPERTY; PIEZOELECTRICS; TEST STRUCTURE; UNDERLYING LAYERS;

ALUMINUM NITRIDE; DIAPHRAGMS; MEMS; MICROELECTRONICS; PIEZOELECTRICITY;

TESTING;

EID: 84862062962 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/ICMTS.2012.6190612 Document Type: Conference Paper

Times cited : (17)

References (5)

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2
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3
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4
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