CMOS Compatible low-frequency aluminium nitride MEMS piezoelectric energy harvesting device

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8763, Issue , 2013, Pages

  Jackson, N ^a   O'Keeffe, R ^a   O'Neill, M ^b   Waldron, F ^a   Mathewson, A ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b ANALOG DEVICES   (Ireland)

Author keywords

Aluminium nitride; Energy harvesting; MEMS; Piezoelectrics

Indexed keywords

CANTILEVER STRUCTURES; ENERGY HARVESTING DEVICE; MATERIAL DEPOSITION; MEMS CANTILEVERS; MEMS FABRICATION TECHNIQUES; PIEZOELECTRIC ENERGY HARVESTING; PIEZOELECTRICS; VIBRATIONAL ENERGIES;

ACTUATORS; ALUMINUM NITRIDE; CRYSTAL ORIENTATION; DEPOSITION; FABRICATION; MEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; PIEZOELECTRICITY; SMART SENSORS;

ENERGY HARVESTING;

EID: 84881185348     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2016469     Document Type: Conference Paper

References (7)

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