SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 603-606

Flexible piezoelectric cantilevers fabricated on polyimide substrate

(8) Petroni, S a Maruccio, G b Guido, F a Amato, M a Campa, A c Passaseo, A c Todaro, M T c De Vittorio, M a,b,c

a ISTITUTO ITALIANO DI TECNOLOGIA (Italy)

b UNIVERSITY OF SALENTO (Italy)

c CNR (Italy)

Author keywords

AlN; Cantilevers; Flexible; Piezoelectric transduction; Polyimide

Indexed keywords

ACTIVE LAYER; ALN; ALN THIN FILMS; CANTILEVERS; ELASTIC SUBSTRATE; FLEXIBLE; FLEXIBLE LAYER; HEXAGONAL CRYSTAL STRUCTURE; MECHANICAL RESPONSE; MICRO-CANTILEVERS; OPTIMIZED PROCESS; PIEZOELECTRIC CANTILEVERS; PIEZOELECTRIC TRANSDUCTION; PIEZORESPONSE; POLYIMIDE SUBSTRATE; RESIDUAL COMPRESSIVE STRESS; RESONANCE FREQUENCIES; SILICON SUPPORT; SPUTTERING DEPOSITION;

ALUMINUM NITRIDE; FABRICATION; FILM PREPARATION; FINITE ELEMENT METHOD; FLEXIBLE STRUCTURES; MOLYBDENUM; PIEZOELECTRICITY; POLYIMIDES;

NANOCANTILEVERS;

EID: 84865587927 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2012.05.055 Document Type: Conference Paper

Times cited : (20)

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