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Volumn 2, Issue 1, 2013, Pages

Plasma-assisted atomic layer deposition of SrTiO3: Stoichiometry and crystallinity studied by spectroscopic ellipsometry

Author keywords

[No Author keywords available]

Indexed keywords


EID: 84885588464     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.024301jss     Document Type: Article
Times cited : (27)

References (40)
  • 7
    • 84887492918 scopus 로고    scopus 로고
    • http://www.itrs.net/reports.html-2011 updated version.
  • 40
    • 0006356234 scopus 로고    scopus 로고
    • Powder Diffraction File Card No 35-0734, Newton Square, PA
    • Powder Diffraction File, Card No 35-0734, International Center for Diffraction Data, Newton Square, PA.
    • International Center for Diffraction Data


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.