Optical properties and band gap characterization of high dielectric constant oxides

Thin Solid Films

Volumn 520, Issue 14, 2012, Pages 4532-4535

  Fursenko, O ^a   Bauer, J ^a   Lupina, G ^a   Dudek, P ^a   Lukosius, M ^a   Wenger, Ch ^a   Zaumseil, P ^a  

^a IHP   (Germany)

Author keywords

Band gap; Critical points; Dielectric constants; High dielectrics; Reflectometry; Spectroscopic ellipsometry; Urbach energy

Indexed keywords

ABSORPTION COEFFICIENTS; CRITICAL POINTS; DEVICE PERFORMANCE; DIELECTRIC FUNCTIONS; HIGH DIELECTRIC CONSTANTS; INTERBAND; OPTICAL BAND GAP ENERGY; OPTICAL CHARACTERIZATION; OPTICAL METROLOGY; REFLECTOMETRY; SRTIO; URBACH ENERGY;

BARIUM COMPOUNDS; ENERGY GAP; HAFNIUM OXIDES; OPTICAL PROPERTIES; PERMITTIVITY; REFLECTION; REFLECTOMETERS; SPECTROSCOPIC ELLIPSOMETRY;

DIELECTRIC MATERIALS;

EID: 84860287376     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.10.195     Document Type: Conference Paper

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