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Volumn 257, Issue 23-24, 2013, Pages 3192-3201

Amidinates, guanidinates and iminopyrrolidinates: Understanding precursor thermolysis to design a better ligand

Author keywords

Amidinates; Atomic layer deposition; Chemical vapor deposition; Coinage metals; Guanidinates; Iminopyrrolidinates; Main group metals; Thermolysis

Indexed keywords


EID: 84885480671     PISSN: 00108545     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ccr.2013.03.015     Document Type: Review
Times cited : (108)

References (48)
  • 1
    • 84885476076 scopus 로고    scopus 로고
    • http://www.itrs.net/Links/2011ITRS/Home2011.htm.
  • 7
    • 0004004688 scopus 로고
    • Wiley-VCH, Weinheim, T.T. Kodas, M.J. Hampden-Smith (Eds.)
    • The Chemistry of Metal CVD 1994, Wiley-VCH, Weinheim. T.T. Kodas, M.J. Hampden-Smith (Eds.).
    • (1994) The Chemistry of Metal CVD


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.