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Volumn 11, Issue 9, 2011, Pages 8198-8201

Decomposition schemes of copper(I) N,N′-diisopropylacetamidinate during chemical vapor deposition of copper

Author keywords

Copper film; Copper(I) amidinate; Gas phase composition; Mass spectrometry; MOCVD; Thermal decomposition mechanism

Indexed keywords

COLD WALL; COPPER FILMS; CVD PROCESS; CVD REACTORS; DECOMPOSITION MECHANISM; DECOMPOSITION SCHEME; GAS PHASE COMPOSITION; GASPHASE; HALOGEN-FREE COMPOUNDS; HOT WALL; IN-VACUUM; LOW PRESSURES; PROTONATED; PURE COPPER; SUBATMOSPHERIC PRESSURES; THERMAL DECOMPOSITION MECHANISM;

EID: 84856845227     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.5099     Document Type: Conference Paper
Times cited : (12)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.