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Volumn 10, Issue 3-5, 2000, Pages 201-211

Synthesis and solution decomposition kinetics of flash-vaporizable liquid barium beta-diketonates

Author keywords

Barium compounds; Beta diketonates; Beta hydrogen elimination; Chemical vapour deposition; Decomposition kinetics; Decomposition mechanism; Liquid precursors; Vaporization

Indexed keywords

DECOMPOSITION KINETICS; HYDROGEN ELIMINATION; LIQUID PRECURSORS;

EID: 0034180010     PISSN: 1616301X     EISSN: None     Source Type: Journal    
DOI: 10.1002/1099-0712(200005/10)10:3/5<201::AID-AMO413>3.0.CO;2-O     Document Type: Article
Times cited : (14)

References (10)
  • 10
    • 85018117250 scopus 로고    scopus 로고
    • International Patent Application WO 99/28532
    • Gordon RG. International Patent Application WO 99/28532, 1999.
    • (1999)
    • Gordon, R.G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.