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Volumn 29, Issue 12, 2010, Pages 2522-2526

Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO2 thin film

(5) Eleter, Mohamad a Hubert Pfalzgraf, L G a Daniele, Stéphane a Pilet, Guillaume b Tinant, Bernand c

a INST DE RECHERCHES SUR LA CATALYSE (France)

b UNIVERSITÉ CLAUDE BERNARD LYON 1 (France)

c Laboratoire de Physico Chimie de la Combustion (Belgium)

Author keywords

Amidinate; Guanidinate; Hafnium

Indexed keywords

EID: 77955425078 PISSN: 02775387 EISSN: None Source Type: Journal
DOI: 10.1016/j.poly.2010.05.023 Document Type: Article

Times cited : (15)

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