Chemical vapour deposition of In2O3 thin films from a tris-guanidinate indium precursor

Dalton Transactions

Volumn 40, Issue 37, 2011, Pages 9425-9430

  Barry, Seán T ^a   Gordon, Peter G ^a   Ward, Matthew J ^b   Heikkila, Mikko J ^c   Monillas, Wesley H ^d   Yap, Glenn P A ^d   Ritala, Mikko ^c   Leskelä, Markku ^c  

^a CARLETON UNIVERSITY   (Canada)

^b UNIVERSITY OF WESTERN ONTARIO   (Canada)

^c UNIVERSITY OF HELSINKI   (Finland)

^d UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBODIIMIDES; CHEMICAL VAPOUR DEPOSITION; DIMETHYLAMINES; GUANIDINATES; HOMOLEPTIC; INDIUM OXIDE; NMR TUBES; PROTONATED; REACTANT GAS; RESIDUAL MASS; SPACE GROUPS;

CHEMICAL VAPOR DEPOSITION; THERMOGRAVIMETRIC ANALYSIS;

INDIUM;

EID: 80052739204     PISSN: 14779226     EISSN: 14779234     Source Type: Journal    
DOI: 10.1039/c1dt10877h     Document Type: Article

References (26)

1. J. Lopez-Garcia C. Maffiotte C. Guillen Sol. Energy Mater. Sol. Cells 2010 94 1263
2. P.-C. Chen G. Shen H. Chen Y. Ha C. Wu S. Sukcharoenchoke Y. Fu J. Liu A. Facchetti T. J. Marks M. E. Thompson C. Zhou ACS Nano 2009 3 3383
3. A. M. E. Raj C. Ravidhas R. Ravishankar A. R. Kumar G. Selvan M. Jayachandran C. Sanjeeviraja Mater. Res. Bull. 2009 44 1051
4. H. Lee J.-W. Park H. Lee Y. S. Park H.-K. Kim J. Korean Phys. Soc. 2010 56 625
5. S. Kannan L. Rieth F. Solzbacher Sens. Actuators, B 2010 149 8
6. G. Korotcenkov S.-D. Han B. K. Cho V. Brinzari Crit. Rev. Solid State Mat. Sci. 2009 34 1
7. K. Arshak G. Hickey E. Forde J. Harris Nano 2008 3 217
8. G. Cheng E. Stern S. Guthrie M. A. Reed R. Klie Y. Hao G. Meng L. Zhang Appl. Phys. A: Mater. Sci. Process. 2006 85 233
9. G. Korotcenkov Sens. Actuators, B 2005 B107 209
10. T. Asikainen M. Ritala M. Leskelä J. Electrochem. Soc. 1994 141 3210
11. O. Nilsen R. Balasundaraprabhu E. V. Monakhov N. Muthukumarasamy H. Fjellvag B. G. Svensson Thin Solid Films 2009 517 6320
12. N. Tripathi S. Rath V. Ganesan R. J. Choudhary Appl. Surf. Sci. 2010 256 7091
13. K. L. Chopra S. Major D. K. Pandya Thin Solid Films 1983 102 1
14. L. G. Bloor C. J. Carmalt D. Pugh Coord. Chem. Rev. 2011 255 11-12 1293
15. S. Basharat C. J. Carmalt S. A. Barnett D. A. Tocher H. O. Davies Inorg. Chem. 2007 46 9473
16. J.-H. Park G. A. Horley P. O'Brien A. C. Jones M. Motevali J. Mater. Chem. 2001 11 2346
17. H. W. Kim N. H. Kim J. H. Myung J. Mater. Sci. Let. 2005 40 4991
18. S. Suh D. M. Hoffman J. Am. Chem. Soc. 2000 122 9396
19. A. P. Kenney G. P. A. Yap D. S. Richeson S. T. Barry Inorg. Chem. 2005 44 2926
20. A. P. Milanov R. A. Fischer A. Devi Inorg. Chem. 2008 47 11405
21. G. A. DiLabio G. Litwinienko L. S. Shuquiong D. A. Pratt K. U. Ingold J. Phys. Chem. A 2002 106 11719
22. J. P. Coyle P. A. Johnson G. A. DiLabio S. T. Barry J. Muller Inorg. Chem. 2010 49 2844
23. L. Lutterotti Nucl. Instrum. Methods Phys. Res., Sect. B 2010 268 334
24. D. Beena K. J. Lethy R. Vinodkumar V. P. Mahadevan Pillai V. Ganesan D. M. Phase S. K. Sudheer Appl. Surf. Sci. 2009 255 8334
25. A. J. Downs, ed. Chemistry of Aluminium, Gallium, Indium, and Thallium, Blackie Academic & Professional, London, 1993, p. 285
26. G. M. Sheldrick Acta Cryst. 2008 A64 112