SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 110, Issue , 2013, Pages 173-176

High resolution HSQ nanopillar arrays with low energy electron beam lithography

(3) Guerfi, Y a Carcenac, F a Larrieu, G a

a UNIVERSITÉ DE TOULOUSE (France)

Author keywords

1D nanostructure array; Electron beam lithography; HSQ; Inorganic resist; Low energy; Nanofabrication; Nanopillars

Indexed keywords

ASPECT RATIO; ELECTRON BEAMS; ELECTRONS; LITHOGRAPHY; NANOSTRUCTURES; NANOTECHNOLOGY;

1-D NANOSTRUCTURES; HYDROGEN SILSESQUIOXANE; INORGANIC RESIST; LOW ENERGY; LOW ENERGY ELECTRON BEAM LITHOGRAPHY; NANO-PILLAR ARRAYS; NANOPILLARS; TOP DOWN APPROACHES;

ELECTRON BEAM LITHOGRAPHY;

EID: 84885184562 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2013.03.055 Document Type: Article

Times cited : (37)

References (17)

1
- 0038104277
- B. Doyle, S. Datta, M. Doczy, S. Hareland, B. Jin, J. Kavalieros, T. Linton, A. Murthy, R. Rios, R. Chau, IEEE Electron Device Lett. 24 (2003) 263-265.
- (2003) IEEE Electron Device Lett , vol.24 , pp. 263-265
- Doyle, B.¹ Datta, S.² Doczy, M.³ Hareland, S.⁴ Jin, B.⁵ Kavalieros, J.⁶ Linton, T.⁷ Murthy, A.⁸ Rios, R.⁹ Chau, R.¹⁰

2
- 33744822492
- J. Goldberger, A.I. Hochbaum, R. Fan, Nano Lett. 6 (2006) 973-977.
- (2006) Nano Lett , vol.6 , pp. 973-977
- Goldberger, J.¹ Hochbaum, A.I.² Fan, R.³

3
- 35748969089
- R. Chau, B. Doyle, S. Datta, J. Kavalieros, K. Zhang, Nat. Mater. 6 (2007) 810-812.
- (2007) Nat. Mater , vol.6 , pp. 810-812
- Chau, R.¹ Doyle, B.² Datta, S.³ Kavalieros, J.⁴ Zhang, K.⁵

4
- 0034317402
- L. Pain, C. Higgins, B. Scarfogliere, S. Tedesco, B. Dal'Zotto, C. Gourgon, M. Ribeiro, T. Kusumoto, M. Suetsugu, R. Hanawa, J. Vac. Sci. Technol. B 18 (6) (2000) 3388-3396.
- (2000) J. Vac. Sci. Technol. B , vol.18 , Issue.6 , pp. 3388-3396
- Pain, L.¹ Higgins, C.² Scarfogliere, B.³ Tedesco, S.⁴ Dal'zotto, B.⁵ Gourgon, C.⁶ Ribeiro, M.⁷ Kusumoto, T.⁸ Suetsugu, M.⁹ Hanawa, R.¹⁰

5
- 17344393859
- K.A. Lister, B.G. Casey, P.S. Dobson, S. Thoms, D.S. Macintyre, C.D.W. Wilkinson, J.M.R. Weaver, Microelectron. Eng. 73-74 (2004) 319-322.
- (2004) Microelectron. Eng , vol.73-74 , pp. 319-322
- Lister, K.A.¹ Casey, B.G.² Dobson, P.S.³ Thoms, S.⁴ Macintyre, D.S.⁵ Wilkinson, C.D.W.⁶ Weaver, J.M.R.⁷

6
- 12844272449
- H. Namatsu, T. Yamaguchi, M. Nagase, Y. Yamazaki, K. Kurihara, Microelectron. Eng. 41-42 (1998) 331-334.
- (1998) Microelectron. Eng , vol.41-42 , pp. 331-334
- Namatsu, H.¹ Yamaguchi, T.² Nagase, M.³ Yamazaki, Y.⁴ Kurihara, K.⁵

7
- 79960060960
- X.L. Han, Microelectron. Eng. 88 (2011) 2622-2624.
- (2011) Microelectron. Eng , vol.88 , pp. 2622-2624
- Han, X.L.¹

8
- 79955535918
- X.L. Han, G. Larrieu, E. Dubois, J. Nano, Nanotechnology 10 (2010) 7423-7427.
- (2010) Nanotechnology , vol.10 , pp. 7423-7427
- Han, X.L.¹ Larrieu, G.² Dubois, E.³ Nano, J.⁴

9
- 85030487973
- Z. Min, C. Baoqin, X. Changqing, L. Ming, N. Jiebing, Microelectron. Eng. 83 (2006) 788-791.
- (2006) Microelectron. Eng , vol.83 , pp. 788-791
- Min, Z.¹ Baoqin, C.² Changqing, X.³ Ming, L.⁴ Jiebing, N.⁵

10
- 33646470204
- H. Yang, A. Jin, Q. Luo, C. Gu, Z. Cui, Y. Chen, Microelectron. Eng. 83 (2006) 788-791.
- (2006) Microelectron. Eng , vol.83 , pp. 788-791
- Yang, H.¹ Jin, A.² Luo, Q.³ Gu, C.⁴ Cui, Z.⁵ Chen, Y.⁶

11
- 5444243974
- A. Jamieson, C.G. Wilson, Y. Hsu, A.D. Brodie, J. Micro/Nanolithigr. MEMS MOEMS 3 (2004) 442-449.
- (2004) J. Micro/Nanolithigr. MEMS MOEMS , vol.3 , pp. 442-449
- Jamieson, A.¹ Wilson, C.G.² Hsu, Y.³ Brodie, A.D.⁴

12
- 80052806927
- V.R. Manfrinato, L.L. Cheong, H. Duan, D. Winston, H.I. Smith, K.K. Berggren, Microelectron. Eng. 88 (2011) 3070-3074.
- (2011) Microelectron. Eng , vol.88 , pp. 3070-3074
- Manfrinato, V.R.¹ Cheong, L.L.² Duan, H.³ Winston, D.⁴ Smith, H.I.⁵ Berggren, K.K.⁶

13
- 78650092761
- D. Rio, C. Constancias, M. Martin, B. Icard, J. van Nieuwstadt, J. Vijverberg, L. Pain, J. Vac. Sci. Technol. B 28 (2010). C6C14-C6C19.
- (2010) J. Vac. Sci. Technol. B , vol.28
- Rio, D.¹ Constancias, C.² Martin, M.³ Icard, B.⁴ Van Nieuwstadt, J.⁵ Vijverberg, J.⁶ Pain, L.⁷

14
- 0002053947
- H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase, K. Kurihara, J. Vac. Sci. Technol. B 16 (1) (1998) 69-76.
- (1998) J. Vac. Sci. Technol. B , vol.16 , Issue.1 , pp. 69-76
- Namatsu, H.¹ Takahashi, Y.² Yamazaki, K.³ Yamaguchi, T.⁴ Nagase, M.⁵ Kurihara, K.⁶

15
- 84885188516
- Monte carlo simulation, Sherbrook University
- Monte carlo simulation, Casino Software V2, Sherbrook University, 2000.
- (2000) Casino Software V2

16
- 33747113063
- F. Fruleux-Cornu, J. Penaud, E. Dubois, M. François, M. Muller, Mater. Sci. Eng., C 26 (2006) 893-897.
- (2006) Mater. Sci. Eng., C , vol.26 , pp. 893-897
- Fruleux-Cornu, F.¹ Penaud, J.² Dubois, E.³ François, M.⁴ Muller, M.⁵

17
- 84874611144
- G. Larrieu, X.-L. Han, Nanoscale 5 (6) (2013) 2437-2441.
- (2013) Nanoscale , vol.5 , Issue.6 , pp. 2437-2441
- Larrieu, G.¹ Han, X.-L.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.