메뉴 건너뛰기




Volumn 119, Issue , 2013, Pages 204-208

Review of thin-film silicon deposition techniques for high-efficiency solar cells developed at Panasonic/Sanyo

Author keywords

Amorphous silicon; Amorphous silicon germanium; Microcrystalline silicon; Plasma CVD; Solar cell

Indexed keywords

DEPOSITION RATES; EFFICIENCY; MICROCRYSTALLINE SILICON; PLASMA CVD; SILICON SOLAR CELLS; SOLAR CELLS; THIN FILMS;

EID: 84884904550     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2013.06.044     Document Type: Article
Times cited : (43)

References (47)
  • 27
    • 0001619060 scopus 로고
    • The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport
    • Veprek, and V. Maracek The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport Solid State Electronics 11 1968 683 684
    • (1968) Solid State Electronics , vol.11 , pp. 683-684
    • Veprek1    Maracek, V.2
  • 30
  • 33
    • 36449001080 scopus 로고
    • Principles for controlling the optical and electrical properties of hydrogenated amorphous silicon deposited from a silane plasma
    • Y. Hishikawa, S. Tsuda, K. Wakisaka, and Y. Kuwano Principles for controlling the optical and electrical properties of hydrogenated amorphous silicon deposited from a silane plasma Journal of Applied Physics 73 1993 4227 4231
    • (1993) Journal of Applied Physics , vol.73 , pp. 4227-4231
    • Hishikawa, Y.1    Tsuda, S.2    Wakisaka, K.3    Kuwano, Y.4
  • 34
    • 0034245186 scopus 로고    scopus 로고
    • Effects of hydrogen diluted silane plasma on amorphous silicon solar cells
    • M. Isomura, M. Kondo, and A. Matsumura Effects of hydrogen diluted silane plasma on amorphous silicon solar cells Japanese Journal of Applied Physics 39 2000 4721 4726
    • (2000) Japanese Journal of Applied Physics , vol.39 , pp. 4721-4726
    • Isomura, M.1    Kondo, M.2    Matsumura, A.3
  • 36
    • 0343477045 scopus 로고    scopus 로고
    • Origin of the optical gap dependence of a-SiGe solar cell stability
    • A. Terakawa, H. Matsunami, S. Kiyama, and S. Tsuda Origin of the optical gap dependence of a-SiGe solar cell stability Journal of Applied Physics 84 1998 4611 4616 (Pubitemid 128592510)
    • (1998) Journal of Applied Physics , vol.84 , Issue.8 , pp. 4611-4616
    • Terakawa, A.1    Matsunami, H.2    Kiyama, S.3    Tsuda, S.4
  • 38
    • 0034670786 scopus 로고    scopus 로고
    • Hydrogen elimination model of the formation of hydrogen bonding structures during the growth of hydrogenated amorphous silicon by plasma CVD
    • DOI 10.1103/PhysRevB.62.16808
    • A. Terakawa, and H. Matsunami Hydrogen elimination model of the formation of hydrogen bonding structuresduring the growth of hydrogenated amorphous silicon by plasma Physical Review B 62 2000 16808 16814 (Pubitemid 32372776)
    • (2000) Physical Review B - Condensed Matter and Materials Physics , vol.62 , Issue.24 , pp. 16808-16814
    • Terakawa, A.1    Matsunami, H.2
  • 39
    • 0019527489 scopus 로고
    • On light-induced effect in amorphous hydrogenated silicon
    • DOI 10.1063/1.328849
    • S. Guha, K.L. Narasimhan, and S.M. Pietruszko On light induced effect in amorphous hydrogenated silicon Journal of Applied Physics 52 1981 859 860 (Pubitemid 11502272)
    • (1981) Journal of Applied Physics , vol.52 , Issue.2 , pp. 859-860
    • Guha, S.1    Narasimhan, K.L.2    Pietruszko, S.M.3
  • 40
    • 0005401002 scopus 로고    scopus 로고
    • Effects of high hydrogen dilution at low temperature on the film properties of hydrogenated amorphous silicon germanium
    • M. Shima, A. Terakawa, M. Isomura, M. Tanaka, S. Kiyama, and S. Tsuda Effects of high hydrogen dilution at low temperature on the film properties of hydrogenated amorphous silicon germanium Applied Physics Letters 71 1997 84 86 (Pubitemid 127608495)
    • (1997) Applied Physics Letters , vol.71 , Issue.1 , pp. 84-86
    • Shima, M.1    Terakawa, A.2    Isomura, M.3    Tanaka, M.4    Kiyama, S.5    Tsuda, S.6
  • 41
    • 0032179064 scopus 로고    scopus 로고
    • High rate deposition of microcrystalline silicon using conventional plasma-enhanced chemical vapor deposition
    • L. Guo, M. Kondo, M. Fukawa, K. Saitoh, and A. Matsuda High rate deposition of microcrystalline silicon using conventional plasma-enhanced chemical vapor deposition Jpanese Journal of Applied Physics 037 1998 L1116 L1118
    • (1998) Jpanese Journal of Applied Physics , vol.37
    • Guo, L.1    Kondo, M.2    Fukawa, M.3    Saitoh, K.4    Matsuda, A.5
  • 44
    • 0002073999 scopus 로고
    • Very high frequency glow discharge: Plasma- and deposition aspects
    • H. Keppner, U. Kroll, J. Meier, and A. Shah Very high frequency glow discharge: plasma- and deposition aspects Solid State Phenomena 44-46 1995 97 126
    • (1995) Solid State Phenomena , vol.44-46 , pp. 97-126
    • Keppner, H.1    Kroll, U.2    Meier, J.3    Shah, A.4
  • 46
    • 2942590651 scopus 로고    scopus 로고
    • Preparation of microcrystalline silicon films at ultra high-rate of 10 nm/s using high-density plasma
    • C. Niikura, M. Kondo, and A. Matsuda Preparation of microcrystalline silicon films at ultra high-rate of 10 nm/s using high-density plasma Journal of Non-Crystalline Solids 338-340 2004 42 46
    • (2004) Journal of Non-Crystalline Solids , vol.338-340 , pp. 42-46
    • Niikura, C.1    Kondo, M.2    Matsuda, A.3
  • 47
    • 42649124003 scopus 로고    scopus 로고
    • Microstructures of high-growth-rate (up to 8.3 nm/s) microcrystalline silicon photovoltaic layers and their influence on the photovoltaic performance of thin-film solar cells
    • Y. Sobajima, S. Nakano, M. Nishio, Y. Tanaka, T. Toyama, and H. Okamoto Microstructures of high-growth-rate (up to 8.3 nm/s) microcrystalline silicon photovoltaic layers and their influence on the photovoltaic performance of thin-film solar cells Journal of Non-Crystalline Solids 354 2008 2407 2410
    • (2008) Journal of Non-Crystalline Solids , vol.354 , pp. 2407-2410
    • Sobajima, Y.1    Nakano, S.2    Nishio, M.3    Tanaka, Y.4    Toyama, T.5    Okamoto, H.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.