Efficient production technology for microcrystalline silicon solar cells using a Localized Plasma Confinement (LPC) CVD method

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2008, Pages

  Kunii, Toshie ^a   Murata, Kazuya ^a   Matsumoto, Mitsuhiro ^a   Kawamoto, Kunihiro ^a   Kobayashi, Yasutaka ^a   Aya, Youichirou ^a   Nakagawa, Makoto ^a   Terakawa, Akira ^a   Tanaka, Makoto ^a  

^a SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EFFICIENT PRODUCTION; GLASS SUBSTRATES; HIGH DEPOSITION RATES; HIGH QUALITY; HIGH-PRESSURE CONDITION; PRODUCTION TECHNOLOGY; TANDEM SOLAR CELLS; THIN-FILM SOLAR CELLS;

CONVERSION EFFICIENCY; DEPOSITION; DEPOSITION RATES; GLASS; MICROCRYSTALLINE SILICON; PLASMA CONFINEMENT; SUBSTRATES;

SILICON SOLAR CELLS;

EID: 84879710388     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2008.4922609     Document Type: Conference Paper

References (8)

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6. M. Matsumoto et al., Proc. ofWCPEC-4, (2006) 1580.
7. Y. Aya et al., Technical DigestofPVSEC-17, (2007) 177.
8. T. Matsui et al., Proc. ofWCPEC-3, (2003) 1548.