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Applied Physics Letters

Volumn 71, Issue 1, 1997, Pages 84-86

Effects of high hydrogen dilution at low temperature on the film properties of hydrogenated amorphous silicon germanium

(6) Shima, Masaki a Terakawa, Akira a Isomura, Masao a Tanaka, Makoto a Kiyama, Seiichi a Tsuda, Shinya a

a SANYO ELECTRIC CO LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005401002 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.119476 Document Type: Article

Times cited : (16)

References (14)

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