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Volumn 39, Issue 8, 2000, Pages 4721-4726

Effects of hydrogen diluted silane plasma on amorphous silicon solar cells

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; LIGHT ABSORPTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR JUNCTIONS;

HYDROGEN-DILUTED SILANE PLASMA;

SILICON SOLAR CELLS;

EID: 0034245186 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.4721 Document Type: Article

Times cited : (6)

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