Sputtered ZnO thin-film transistors with carrier mobility over 50 2/Vs

IEEE Transactions on Electron Devices

Volumn 60, Issue 10, 2013, Pages 3424-3429

  Brox Nilsen, Christian ^a   Jin, Jidong ^a   Luo, Yi ^b   Bao, Peng ^a   Song, Aimin M ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b Nano EPrint Ltd   (United Kingdom)

Author keywords

High mobility; Radio frequency (RF) sputtering; Room temperature; Thin film transistor (TFT); Zinc oxide (ZnO)

Indexed keywords

C. THIN FILM TRANSISTOR (TFT); HIGH MOBILITY; RADIO-FREQUENCY SPUTTERING; ROOM TEMPERATURE; ZINC OXIDE (ZNO);

CARRIER MOBILITY; DEPOSITION; SEMICONDUCTING ORGANIC COMPOUNDS; THIN FILM TRANSISTORS;

ZINC OXIDE;

EID: 84884694103     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2013.2279401     Document Type: Article

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