메뉴 건너뛰기




Volumn , Issue , 2011, Pages 299-345

Electron Microscopy on Thin Films for Solar Cells

Author keywords

Backscattered electrons (BSEs); Coincidence site lattice (CSL); Electron backscatter diffraction (EBSD); Scanning electron microscopy (SEM); Thin film solar cells; Transmission electron microscopy (TEM)

Indexed keywords


EID: 84882641271     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527636280.ch12     Document Type: Chapter
Times cited : (3)

References (75)
  • 1
    • 0015202422 scopus 로고
    • Determination of kilovolt electron energy dissipation vs penetration distance in solid materials
    • Everhart, T.E. and Hoff, P.H. (1971) Determination of kilovolt electron energy dissipation vs penetration distance in solid materials. J. Appl. Phys., 42 (13), 5837-5846.
    • (1971) J. Appl. Phys. , vol.42 , Issue.13 , pp. 5837-5846
    • Everhart, T.E.1    Hoff, P.H.2
  • 3
    • 0029278241 scopus 로고
    • Field-emission SEM imaging of compositional and doping layer semiconductor superlattices
    • Perovic, D.D., Castell, M.R., Howie, A., Lavoie, C., Tiedje, T., and Cole, J.S.W. (1995) Field-emission SEM imaging of compositional and doping layer semiconductor superlattices. Ultramicroscopy, 58, 104-113.
    • (1995) Ultramicroscopy , vol.58 , pp. 104-113
    • Perovic, D.D.1    Castell, M.R.2    Howie, A.3    Lavoie, C.4    Tiedje, T.5    Cole, J.S.W.6
  • 8
    • 21544482401 scopus 로고
    • Charge collection scanning electron microscopy
    • Leamy, H.J. (1982) Charge collection scanning electron microscopy. J. Appl. Phys., 53 (4), R53-R80.
    • (1982) J. Appl. Phys. , vol.53 , Issue.4
    • Leamy, H.J.1
  • 9
    • 0033875341 scopus 로고    scopus 로고
    • Characterising superstrate CIS solar cells with electron beam induced current
    • 361-362
    • Rechid, J., Kampmann, A., and Reinecke-Koch, R. (2000) Characterising superstrate CIS solar cells with electron beam induced current. Thin Solid Films, 361-362, 198-202.
    • (2000) Thin Solid Films , pp. 198-202
    • Rechid, J.1    Kampmann, A.2    Reinecke-Koch, R.3
  • 11
    • 0006482902 scopus 로고    scopus 로고
    • Cathodoluminescence study of the spatial distribution of electron-hole pairs generated by an electron beam in Al0.4Ga0.6As
    • Bonard, J.M., Ganiere, J.D., Akamatsu, B., Araujo, D., and Reinhart, F.K. (1996) Cathodoluminescence study of the spatial distribution of electron-hole pairs generated by an electron beam in Al0.4Ga0.6As. J. Appl. Phys., 79, 8693-8703.
    • (1996) J. Appl. Phys. , vol.79 , pp. 8693-8703
    • Bonard, J.M.1    Ganiere, J.D.2    Akamatsu, B.3    Araujo, D.4    Reinhart, F.K.5
  • 12
    • 0023826271 scopus 로고
    • Kilovolt electron energy loss distribution in Si
    • Werner, U., Koch, F., and Oelgart, G. (1988) Kilovolt electron energy loss distribution in Si. J. Phys. D: Appl. Phys., 21, 116-124.
    • (1988) J. Phys. D: Appl. Phys. , vol.21 , pp. 116-124
    • Werner, U.1    Koch, F.2    Oelgart, G.3
  • 13
    • 0021486473 scopus 로고
    • Kilovolt electron energy loss distribution in GaAsP
    • Oelgart, G. and Werner, U. (1984) Kilovolt electron energy loss distribution in GaAsP. phys. status solidi (a), 85, 205-213.
    • (1984) phys. status solidi (a) , vol.85 , pp. 205-213
    • Oelgart, G.1    Werner, U.2
  • 14
    • 0030769846 scopus 로고    scopus 로고
    • Electron-beam-generated carrier distributions in semiconductor multilayer structures
    • Mohr, H. and Dunstan, D.J. (1997) Electron-beam-generated carrier distributions in semiconductor multilayer structures. J. Microsc., 187, 119-124.
    • (1997) J. Microsc. , vol.187 , pp. 119-124
    • Mohr, H.1    Dunstan, D.J.2
  • 15
    • 0011086113 scopus 로고
    • Penetration and energy-loss theory of electrons in solid targets
    • Kanaya, K. and Okayama, S. (1972) Penetration and energy-loss theory of electrons in solid targets. J. Phys D: Appl. Phys., 5, 43-58.
    • (1972) J. Phys D: Appl. Phys. , vol.5 , pp. 43-58
    • Kanaya, K.1    Okayama, S.2
  • 16
    • 0001009795 scopus 로고
    • An alternative proof of the generalized reciprocit_a theorem for charge collection
    • Donolato, C. (1989) An alternative proof of the generalized reciprocit_a theorem for charge collection. J. Appl. Phys., 66 (9), 4524-4525.
    • (1989) J. Appl. Phys. , vol.66 , Issue.9 , pp. 4524-4525
    • Donolato, C.1
  • 17
    • 0022013942 scopus 로고
    • A reciprocity theorem for charge collection
    • Donolato, C. (1985) A reciprocity theorem for charge collection. Appl. Phys. Lett., (3), 270-272.
    • (1985) Appl. Phys. Lett. , Issue.3 , pp. 270-272
    • Donolato, C.1
  • 18
    • 0043115375 scopus 로고
    • Evaluation of diffusion lengths and surface recombination velocities from electron beam induced current scans
    • Donolato, C. (1983) Evaluation of diffusion lengths and surface recombination velocities from electron beam induced current scans. Appl. Phys. Lett., 43 (1), 120-122.
    • (1983) Appl. Phys. Lett. , vol.43 , Issue.1 , pp. 120-122
    • Donolato, C.1
  • 19
    • 36749108955 scopus 로고
    • Application of scanning electron microscopy to determination of surface recombination velocity: GaAs
    • Jastrzebski, L., Lagowski, J., and Gatos, H.C. (1975) Application of scanning electron microscopy to determination of surface recombination velocity: GaAs. Appl. Phys. Lett., 27 (10), 537-539.
    • (1975) Appl. Phys. Lett. , vol.27 , Issue.10 , pp. 537-539
    • Jastrzebski, L.1    Lagowski, J.2    Gatos, H.C.3
  • 20
    • 58949086613 scopus 로고    scopus 로고
    • Evaluation of electron beam induced current profies of Cu(In,Ga)Se2 solar cells with different Ga-contents
    • Kniese, R., Powalla, M., and Rau, U. (2009) Evaluation of electron beam induced current profies of Cu(In,Ga)Se2 solar cells with different Ga-contents. Thin Solid Films, 517, 2357-2359.
    • (2009) Thin Solid Films , vol.517 , pp. 2357-2359
    • Kniese, R.1    Powalla, M.2    Rau, U.3
  • 21
    • 0022564583 scopus 로고
    • EBIC investigations of junction activity and the role of oxygen in CdS/CuInSe2 devices
    • Matson, R.J., Noufi, R., Ahrenkiel, R.K., and Powell, R.C., (1986) EBIC investigations of junction activity and the role of oxygen in CdS/CuInSe2 devices. Solar Cells, 16, 495-519.
    • (1986) Solar Cells , vol.16 , pp. 495-519
    • Matson, R.J.1    Noufi, R.2    Ahrenkiel, R.K.3    Powell, R.C.4
  • 23
    • 0141964067 scopus 로고    scopus 로고
    • Characterization of direct epitaxial silicon thin film solar cells on a low-cost substrate
    • Liang, Z.C., Shen, H., Xu, N.S., and Reber, S. (2003) Characterization of direct epitaxial silicon thin film solar cells on a low-cost substrate. Sol. Energy Mater. Sol. Cells, 80, 181-193.
    • (2003) Sol. Energy Mater. Sol. Cells , vol.80 , pp. 181-193
    • Liang, Z.C.1    Shen, H.2    Xu, N.S.3    Reber, S.4
  • 25
    • 0033882138 scopus 로고    scopus 로고
    • EBIC and luminescence mapping of CdTe/CdS solar cells
    • 361-362
    • Edwards, P.R., Galloway, S.A., and Durose, K. (2000) EBIC and luminescence mapping of CdTe/CdS solar cells. Thin Solid Films, 361-362, 364-370.
    • (2000) Thin Solid Films , pp. 364-370
    • Edwards, P.R.1    Galloway, S.A.2    Durose, K.3
  • 26
    • 0033078101 scopus 로고    scopus 로고
    • Characterization of thin film CdS/CdTe solar cellsusing electron and optical beam induced current
    • Galloway, S.A., Edwards, P.R., and Durose, K. (1999) Characterization of thin film CdS/CdTe solar cellsusing electron and optical beam induced current. Solar Energy Mater. Sol. Cells, 57, 61-74.
    • (1999) Solar Energy Mater. Sol. Cells , vol.57 , pp. 61-74
    • Galloway, S.A.1    Edwards, P.R.2    Durose, K.3
  • 27
    • 0032659779 scopus 로고    scopus 로고
    • Qualitative and quantitative analysis of thin film heterostructures by electron beam induced current
    • 67-68
    • Scheer, R. (1999) Qualitative and quantitative analysis of thin film heterostructures by electron beam induced current. Solid State Phenom., 67-68, 57-68.
    • (1999) Solid State Phenom , pp. 57-68
    • Scheer, R.1
  • 28
    • 0017969164 scopus 로고
    • Investigation of minority-carrier diffusion lengths by electron beam induced bombardment of Schottky barriers
    • Wu, C.J. and Wittry, D.B. (1978) Investigation of minority-carrier diffusion lengths by electron beam induced bombardment of Schottky barriers. J. Appl. Phys., 49 (5), 2827-2836.
    • (1978) J. Appl. Phys. , vol.49 , Issue.5 , pp. 2827-2836
    • Wu, C.J.1    Wittry, D.B.2
  • 29
    • 62949160304 scopus 로고    scopus 로고
    • Evaluation of diffusionrecombination parameters in electrodeposited CuIn(S,Se)2 solar cells by means of electron beam induced currents and modelling
    • Sieber, B., Ruiz, C.M., and Bermudez, V. (2009) Evaluation of diffusionrecombination parameters in electrodeposited CuIn(S,Se)2 solar cells by means of electron beam induced currents and modelling. Superlattice Microstruct., 45, 161-167.
    • (2009) Superlattice Microstruct , vol.45 , pp. 161-167
    • Sieber, B.1    Ruiz, C.M.2    Bermudez, V.3
  • 30
    • 0141964067 scopus 로고    scopus 로고
    • Characterization of direct epitaxial silicon thin film solar cells on a low-cost substrate
    • Liang, Z.C., Shen, H., Xu, N.S., and Reber, S. (2003) Characterization of direct epitaxial silicon thin film solar cells on a low-cost substrate. Sol. Energy Mater. Sol. Cells, 80, 181-193.
    • (2003) Sol. Energy Mater. Sol. Cells , vol.80 , pp. 181-193
    • Liang, Z.C.1    Shen, H.2    Xu, N.S.3    Reber, S.4
  • 31
    • 30244472952 scopus 로고
    • Diffusion length measurements on n-CuInS2 crystals by evaluation of electronbeam induced current profiles in edgescan and planar configurations
    • Scheer, R. and Lewerenz, H.W. (1995) Diffusion length measurements on n-CuInS2 crystals by evaluation of electronbeam induced current profiles in edgescan and planar configurations. J. Appl. Phys., 77 (5), 2006-2009.
    • (1995) J. Appl. Phys. , vol.77 , Issue.5 , pp. 2006-2009
    • Scheer, R.1    Lewerenz, H.W.2
  • 32
    • 33748841392 scopus 로고
    • Evaluation of diffusion length and surface recombination velocity from a planar collector geometry electron-beaminduced current scan
    • Kuiken, H.K. and van Opdorp, C. (1985) Evaluation of diffusion length and surface recombination velocity from a planar collector geometry electron-beaminduced current scan. J. Appl. Phys., 57 (6), 2077-2090.
    • (1985) J. Appl. Phys. , vol.57 , Issue.6 , pp. 2077-2090
    • Kuiken, H.K.1    van Opdorp, C.2
  • 33
    • 34247379401 scopus 로고    scopus 로고
    • Characterization of the CdS/Cu(In,Ga)Se2 interface by electron beam induced currents
    • Kniese, R., Powalla, M., and Rau, U. (2007) Characterization of the CdS/Cu(In,Ga)Se2 interface by electron beam induced currents. Thin Solid Films, 515, 6163-6167.
    • (2007) Thin Solid Films , vol.515 , pp. 6163-6167
    • Kniese, R.1    Powalla, M.2    Rau, U.3
  • 35
    • 0017973536 scopus 로고
    • Silicon solar cell designs based on physical behaviour in concentrated sunlight
    • Fossum, J.G. and Burgess, E.L. (1978) Silicon solar cell designs based on physical behaviour in concentrated sunlight. Solid State Electron., 21, 729-737.
    • (1978) Solid State Electron , vol.21 , pp. 729-737
    • Fossum, J.G.1    Burgess, E.L.2
  • 36
    • 0028426526 scopus 로고
    • Evaluation of diffusion length at different excess carrier concentrations
    • Cavalcoli, D. and Cavallini, A. (1994) Evaluation of diffusion length at different excess carrier concentrations. Mater. Sci. Eng., B24, 98-100.
    • (1994) Mater. Sci. Eng. , vol.B24 , pp. 98-100
    • Cavalcoli, D.1    Cavallini, A.2
  • 37
    • 0019046011 scopus 로고
    • The temperature distribution in a thin metal film exposed to an electron beam
    • Röll, K. (1980) The temperature distribution in a thin metal film exposed to an electron beam. Appl. Surf. Sci., 5, 388-397.
    • (1980) Appl. Surf. Sci. , vol.5 , pp. 388-397
    • Röll, K.1
  • 38
    • 36449005628 scopus 로고
    • Minority carrier diffusion length and edge surface recombination velocity in In P
    • Hakimzadeh, R. and Bailey, S.G. (1993) Minority carrier diffusion length and edge surface recombination velocity in In P. J. Appl. Phys., 74 (2), 1118-1123.
    • (1993) J. Appl. Phys. , vol.74 , Issue.2 , pp. 1118-1123
    • Hakimzadeh, R.1    Bailey, S.G.2
  • 41
    • 3843111067 scopus 로고    scopus 로고
    • Scanning probe microscopy in materials science
    • Meyer, E., Jarvis, S.P., and Spencer, N.D. (2004) Scanning probe microscopy in materials science. MRS Bulletin, 29, 443-448.
    • (2004) MRS Bulletin , vol.29 , pp. 443-448
    • Meyer, E.1    Jarvis, S.P.2    Spencer, N.D.3
  • 42
    • 79955999119 scopus 로고    scopus 로고
    • Interdependence of absorber composition and recombination mechanism in Cu(In, Ga)(Se,S)2 heterojunction solar cells
    • Turcu, M., Pakma, O., and Rau, U. (2002) Interdependence of absorber composition and recombination mechanism in Cu(In, Ga)(Se,S)2 heterojunction solar cells. Appl. Phys. Lett., 80, 2598-2600.
    • (2002) Appl. Phys. Lett. , vol.80 , pp. 2598-2600
    • Turcu, M.1    Pakma, O.2    Rau, U.3
  • 43
    • 0005143088 scopus 로고    scopus 로고
    • EBIC studies of grain boundaries
    • Holt, D.B., Raza, B., and Wojcik, A. (1996) EBIC studies of grain boundaries. Mater. Sci. Eng., B42, 14-23.
    • (1996) Mater. Sci. Eng. , vol.B42 , pp. 14-23
    • Holt, D.B.1    Raza, B.2    Wojcik, A.3
  • 47
    • 0030221970 scopus 로고    scopus 로고
    • Focal-series reconstruction in HRTEM: Simulation studies on non-periodic objects
    • Thust, A., Coene, W.M.J., Op de Beeck, M., and Van Dyck, D. (1996) Focal-series reconstruction in HRTEM: Simulation studies on non-periodic objects. Ultramicroscopy, 64, 211-230.
    • (1996) Ultramicroscopy , vol.64 , pp. 211-230
    • Thust, A.1    Coene, W.M.J.2    Op de Beeck, M.3    Van Dyck, D.4
  • 48
    • 63749124866 scopus 로고    scopus 로고
    • Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-angstrom information limit
    • Kisielowski, C., Freitag, B., Bischoff, M., van Lin, H., Lazar, S., Knippels, G. et al. (2008) Detection of single atoms and buried defects in three dimensions by aberration-corrected electron microscope with 0.5-angstrom information limit. Microsc. Microanal., 14, 454-462.
    • (2008) Microsc. Microanal. , vol.14 , pp. 454-462
    • Kisielowski, C.1    Freitag, B.2    Bischoff, M.3    van Lin, H.4    Lazar, S.5    Knippels, G.6
  • 49
    • 0028533344 scopus 로고
    • Correction of aberrations, a promising means for improving the spatial and energy resolution of energyfiltering electron microscopes
    • Rose, H. (1994) Correction of aberrations, a promising means for improving the spatial and energy resolution of energyfiltering electron microscopes. Ultramicroscopy, 56, 11-25.
    • (1994) Ultramicroscopy , vol.56 , pp. 11-25
    • Rose, H.1
  • 51
    • 21444458773 scopus 로고    scopus 로고
    • Microstructural and chemical studies of interfaces between Cu(In,Ga) Se2 and In2S3 layers
    • 084908- 1-8
    • Abou-Ras, D., Rudmann, D., Kostorz, G., Spiering, S., Powalla, M., and Tiwari, A.N. (2005) Microstructural and chemical studies of interfaces between Cu(In,Ga) Se2 and In2S3 layers. J. Appl. Phys., 97 (12), 084908- 1-8.
    • (2005) J. Appl. Phys. , vol.97 , Issue.12
    • Abou-Ras, D.1    Rudmann, D.2    Kostorz, G.3    Spiering, S.4    Powalla, M.5    Tiwari, A.N.6
  • 54
    • 75649097460 scopus 로고    scopus 로고
    • Correlating the structural, chemical, and optical properties at nanometer resolution
    • Gu, L., Ozdol, V.B., Sigle, W., Koch, C.T., Srot, V., and van Aken, P.A. (2010) Correlating the structural, chemical, and optical properties at nanometer resolution. J. Appl. Phys., 107, 013501.
    • (2010) J. Appl. Phys. , vol.107 , pp. 013501
    • Gu, L.1    Ozdol, V.B.2    Sigle, W.3    Koch, C.T.4    Srot, V.5    van Aken, P.A.6
  • 55
    • 0033092472 scopus 로고    scopus 로고
    • Determination of the complex dielectric function of epitaxial SrTiO2 films using transmission electron energy-loss spectroscopy
    • Ryen, L., Wang, X., Helmersson, U., and Olsson, E. (1999) Determination of the complex dielectric function of epitaxial SrTiO2 films using transmission electron energy-loss spectroscopy. J.Appl. Phys., 85, 2828-2834.
    • (1999) J.Appl. Phys. , vol.85 , pp. 2828-2834
    • Ryen, L.1    Wang, X.2    Helmersson, U.3    Olsson, E.4
  • 58
    • 4644259301 scopus 로고    scopus 로고
    • Model based quantification of EELS spectra
    • Verbeeck, J. and Van Aert, S. (2004) Model based quantification of EELS spectra. Ultramicroscopy, 101, 207-224.
    • (2004) Ultramicroscopy , vol.101 , pp. 207-224
    • Verbeeck, J.1    Van Aert, S.2
  • 59
    • 24944474406 scopus 로고    scopus 로고
    • Analytical transmission electron microscopy
    • Sigle, W. (2005) Analytical transmission electron microscopy. Ann. Rev.Mater. Res., 35, 239-314.
    • (2005) Ann. Rev.Mater. Res. , vol.35 , pp. 239-314
    • Sigle, W.1
  • 61
    • 0022900244 scopus 로고
    • Electron holography approaching atomic resolution
    • Lichte, H. (1986) Electron holography approaching atomic resolution. Ultramicroscopy, 20, 293-304.
    • (1986) Ultramicroscopy , vol.20 , pp. 293-304
    • Lichte, H.1
  • 62
    • 36449003599 scopus 로고
    • Direct observation of potential distribution across Si/Si p-n junctions using off-axis electron holography
    • McCartney, M.R., Smith, D.J., Hull, R., Bean, J.C., Voelkl, E., and Frost, B. (1995) Direct observation of potential distribution across Si/Si p-n junctions using off-axis electron holography. Appl. Phys. Lett., 65 (20), 2603-2605.
    • (1995) Appl. Phys. Lett. , vol.65 , Issue.20 , pp. 2603-2605
    • McCartney, M.R.1    Smith, D.J.2    Hull, R.3    Bean, J.C.4    Voelkl, E.5    Frost, B.6
  • 63
    • 0036933483 scopus 로고    scopus 로고
    • Tutorial on off-axis electron holography
    • Lehmann, M. and Lichte, H. (2002) Tutorial on off-axis electron holography. Microsc. Microanal., 8, 447-466.
    • (2002) Microsc. Microanal. , vol.8 , pp. 447-466
    • Lehmann, M.1    Lichte, H.2
  • 64
    • 0034023809 scopus 로고    scopus 로고
    • The development of Fresnel contrast analysis, and the interpretation of mean inner potential profiles at interfaces
    • Dunin-Burkowski, R.E. (2000) The development of Fresnel contrast analysis, and the interpretation of mean inner potential profiles at interfaces. Ultramicroscopy, 83, 193-216.
    • (2000) Ultramicroscopy , vol.83 , pp. 193-216
    • Dunin-Burkowski, R.E.1
  • 65
    • 33646051202 scopus 로고    scopus 로고
    • Projected potential profiles across interfaces obtained by reconstructing the exit face wave function from through focal series
    • Bhattacharyya, S., Koch, C.T., and Rühle, M. (2006) Projected potential profiles across interfaces obtained by reconstructing the exit face wave function from through focal series. Ultramicroscopy, 106, 525-538.
    • (2006) Ultramicroscopy , vol.106 , pp. 525-538
    • Bhattacharyya, S.1    Koch, C.T.2    Rühle, M.3
  • 66
    • 77952319371 scopus 로고    scopus 로고
    • Off-axis and inline electron holography: Experimental comparison
    • Latychevskaia, T., Formanek, P., Koch, C.T., and Lubk, A. (2010) Off-axis and inline electron holography: Experimental comparison. Ultramicroscopy, 110 (5), 472-482.
    • (2010) Ultramicroscopy , vol.110 , Issue.5 , pp. 472-482
    • Latychevskaia, T.1    Formanek, P.2    Koch, C.T.3    Lubk, A.4
  • 73
    • 0029360541 scopus 로고
    • Application of the ion-less tripod polisher to the preparation of YBCO superconducting multilayer and bulk ceramics thin films
    • Ayache, J. and Albaréde, P.H. (1995) Application of the ion-less tripod polisher to the preparation of YBCO superconducting multilayer and bulk ceramics thin films. Ultramicroscopy, 60, 195-206.
    • (1995) Ultramicroscopy , vol.60 , pp. 195-206
    • Ayache, J.1    Albaréde, P.H.2
  • 75
    • 34249785085 scopus 로고    scopus 로고
    • TEM sample preparation and FIB-induced damage
    • Mayer, J.,Giannuzzi, L.A., Kamino, T., and Michael, J. (2007) TEM sample preparation and FIB-induced damage. MRS Bull., 32, 400-407.
    • (2007) MRS Bull , vol.32 , pp. 400-407
    • Mayer, J.1    Giannuzzi, L.A.2    Kamino, T.3    Michael, J.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.