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Volumn 8, Issue 6, 2002, Pages 447-466

Tutorial on off-axis electron holography

Author keywords

2D dopant profiling; Correction of aberrations; Exit wave reconstruction; Off axis electron holography; Quantitative evaluation of exit wave; Wave optics

Indexed keywords

ELECTRON MICROSCOPY; HOLOGRAPHY; METHODOLOGY; REPRODUCIBILITY; REVIEW; SENSITIVITY AND SPECIFICITY; THEORETICAL MODEL;

EID: 0036933483     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927602029938     Document Type: Review
Times cited : (150)

References (59)
  • 1
    • 0003907198 scopus 로고    scopus 로고
    • Optical characteristics of a holography microscope
    • Völkl, E., Allard, L.F. & Joy, D.C. (Eds.). New York: Kluwer Academics/Plenum Publishers
    • Allard, L.F. & Völkl, E. (1999). Optical characteristics of a holography microscope. In Introduction to Electron Holography, Völkl, E., Allard, L.F. & Joy, D.C. (Eds.), pp. 56-86. New York: Kluwer Academics/Plenum Publishers.
    • (1999) Introduction to Electron Holography , pp. 56-86
    • Allard, L.F.1    Völkl, E.2
  • 2
    • 0031897296 scopus 로고    scopus 로고
    • Why don't high-resolution simulations and images match?
    • Boothroyd, C.B. (1998). Why don't high-resolution simulations and images match? J Microsc 190, 99-108.
    • (1998) J Microsc , vol.190 , pp. 99-108
    • Boothroyd, C.B.1
  • 3
    • 23044529589 scopus 로고    scopus 로고
    • Quantitative electron holography - From the basis of dynamical interaction to holographic materials analysis
    • Brand, K., Guo, Ch., Lehmann, M. & Lichte, H. (2001). Quantitative electron holography - From the basis of dynamical interaction to holographic materials analysis. In Proc Conf Microscopy and Microanalysis, p. 284.
    • (2001) Proc Conf Microscopy and Microanalysis , pp. 284
    • Brand, K.1    Guo, Ch.2    Lehmann, M.3    Lichte, H.4
  • 4
    • 0012445904 scopus 로고
    • Lichtstarke interferenzen mit einem biprisma für elektronenwellen
    • Düker, H. (1955). Lichtstarke interferenzen mit einem biprisma für elektronenwellen. Zeitschrift für Naturforschung 10, 255-256.
    • (1955) Zeitschrift für Naturforschung , vol.10 , pp. 255-256
    • Düker, H.1
  • 6
    • 0001367051 scopus 로고
    • Electron holographic observations of the electrostatic field associated with thin reverse-biased p-n junctions
    • Frabboni, S., Matteucci, G. & Pozzi, G. (1985). Electron holographic observations of the electrostatic field associated with thin reverse-biased p-n junctions. Phys Rev Lett 55, 2196.
    • (1985) Phys Rev Lett , vol.55 , pp. 2196
    • Frabboni, S.1    Matteucci, G.2    Pozzi, G.3
  • 7
    • 0015672282 scopus 로고
    • The envelope of electron microscopic transfer functions for partially coherent illumination
    • Frank, J. (1973). The envelope of electron microscopic transfer functions for partially coherent illumination. Optik 38, 519-536.
    • (1973) Optik , vol.38 , pp. 519-536
    • Frank, J.1
  • 8
    • 0012403631 scopus 로고
    • Numerical reconstruction of the electron object wave from an electron hologram including the correction of aberrations
    • Franke, F.J., Herrmann, K.-H. & Lichte, H. (1988). Numerical reconstruction of the electron object wave from an electron hologram including the correction of aberrations, Scan Microsc Suppl 2, 59-67.
    • (1988) Scan Microsc Suppl , vol.2 , pp. 59-67
    • Franke, F.J.1    Herrmann, K.-H.2    Lichte, H.3
  • 9
    • 0001908317 scopus 로고
    • Holography of electrostatic fields
    • Tonomura, A., Allard, L.F., Pozzi, G., Joy, D.C. & Ono, Y.A. (Eds.). Amsterdam: Elsevier Science B.V.
    • Frost, B.G., Allard, L.F., Völkl, E. & Joy, D.C. (1995). Holography of electrostatic fields. In Electron Holography, Tonomura, A., Allard, L.F., Pozzi, G., Joy, D.C. & Ono, Y.A. (Eds.). Amsterdam: Elsevier Science B.V.
    • (1995) Electron Holography
    • Frost, B.G.1    Allard, L.F.2    Völkl, E.3    Joy, D.C.4
  • 10
    • 0030128885 scopus 로고    scopus 로고
    • An improved mode of operation of a transmission electron microscope for wide field off-axis holography
    • Frost, B.G., Voelkl, E. & Allard, L.F. (1996). An improved mode of operation of a transmission electron microscope for wide field off-axis holography. Ultramicroscopy 63, 15-20.
    • (1996) Ultramicroscopy , vol.63 , pp. 15-20
    • Frost, B.G.1    Voelkl, E.2    Allard, L.F.3
  • 11
    • 0029149259 scopus 로고
    • Holographic measurement of the wave aberration of an electron microscope by means of the phases in the Fourier spectrum
    • Fu, Q. & Lichte, H. (1995). Holographic measurement of the wave aberration of an electron microscope by means of the phases in the Fourier spectrum. J Microsc 179, 112-118.
    • (1995) J Microsc , vol.179 , pp. 112-118
    • Fu, Q.1    Lichte, H.2
  • 12
    • 0000974029 scopus 로고
    • Correction of aberrations of an electron microscope by means of electron holography
    • Fu, Q., Lichte, H. & Völkl, E. (1991). Correction of aberrations of an electron microscope by means of electron holography. Phys Rev Lett 67, 2319-2322.
    • (1991) Phys Rev Lett , vol.67 , pp. 2319-2322
    • Fu, Q.1    Lichte, H.2    Völkl, E.3
  • 13
    • 34250769340 scopus 로고
    • A new microscopic principle
    • Gabor, D. (1948). A new microscopic principle. Nature 161, 777-778.
    • (1948) Nature , vol.161 , pp. 777-778
    • Gabor, D.1
  • 14
    • 0000763825 scopus 로고
    • Microscopy by reconstructed wave-fronts
    • Gabor, D. (1949). Microscopy by reconstructed wave-fronts. Proc Roy Soc A 197, 454-487.
    • (1949) Proc Roy Soc A , vol.197 , pp. 454-487
    • Gabor, D.1
  • 15
    • 0002631127 scopus 로고    scopus 로고
    • Applications of electron holography
    • Völkl, E., Allard, L.F. & Joy, D.C. (Eds.). New York: Kluwer Academics/Plenum Publishers
    • Gajdardziska-Josifovska, M. & Carim, A.H. (1999). Applications of electron holography. In Introduction to Electron Holography, Völkl, E., Allard, L.F. & Joy, D.C. (Eds.), pp. 267-293. New York: Kluwer Academics/Plenum Publishers.
    • (1999) Introduction to Electron Holography , pp. 267-293
    • Gajdardziska-Josifovska, M.1    Carim, A.H.2
  • 16
    • 0000653265 scopus 로고    scopus 로고
    • 7?
    • Cancun (Mexico), Benavides, H.A.C. & Yacaman, M. (Eds.). Bristol, England: Institute of Physics Publishing
    • 7? Proc 14th Int Congress on Electron Microscopy ICEMI4, Cancun (Mexico), Benavides, H.A.C. & Yacaman, M. (Eds.), Vol. 1, p. 535. Bristol, England: Institute of Physics Publishing.
    • (1998) Proc 14th Int Congress on Electron Microscopy ICEMI4 , vol.1 , pp. 535
    • Gieger, D.1    Lichte, H.2
  • 18
    • 0000703590 scopus 로고
    • The formation of the diffraction image with electrons in the Gabor diffraction microscope
    • Haine, M.E. & Mulvey, T. (1952). The formation of the diffraction image with electrons in the Gabor diffraction microscope. J Opt Soc Am 42, 763.
    • (1952) J Opt Soc Am , vol.42 , pp. 763
    • Haine, M.E.1    Mulvey, T.2
  • 19
    • 0002099162 scopus 로고
    • The optical transfer theory of the electron microscope: Fundamental principles and applications
    • Hanssen, K.-J. (1971). The optical transfer theory of the electron microscope: Fundamental principles and applications. Adv Optics Electron Microsc 4, 1-84.
    • (1971) Adv Optics Electron Microsc , vol.4 , pp. 1-84
    • Hanssen, K.-J.1
  • 22
    • 0030221753 scopus 로고    scopus 로고
    • Experimental study of amplitude and phase detection limits in electron holography
    • Harscher, A. & Lichte, H. (1996). Experimental study of amplitude and phase detection limits in electron holography. Ultramicroscopy 64, 57-66.
    • (1996) Ultramicroscopy , vol.64 , pp. 57-66
    • Harscher, A.1    Lichte, H.2
  • 23
    • 0027669998 scopus 로고
    • Optimized sampling schemes for off-axis holography
    • Ishizuka, K. (1993). Optimized sampling schemes for off-axis holography. Ultramicroscopy 52, 1-5.
    • (1993) Ultramicroscopy , vol.52 , pp. 1-5
    • Ishizuka, K.1
  • 24
    • 0028417386 scopus 로고
    • Aberration correction using off-axis holography: I. Aberration assessment
    • Ishizuka, K., Tanji, T., Tonomura, A., Ohno, T. & Murayama, Y. (1994). Aberration correction using off-axis holography: I. Aberration assessment. Ultramicroscopy 53, 361-370.
    • (1994) Ultramicroscopy , vol.53 , pp. 361-370
    • Ishizuka, K.1    Tanji, T.2    Tonomura, A.3    Ohno, T.4    Murayama, Y.5
  • 26
    • 0034333411 scopus 로고    scopus 로고
    • Determination and correction of the coherent wave aberration from a single off-axis electron hologram by means of a genetic algorithm
    • Lehmann, M. (2000). Determination and correction of the coherent wave aberration from a single off-axis electron hologram by means of a genetic algorithm. Ultramicroscopy 85, 165-182.
    • (2000) Ultramicroscopy , vol.85 , pp. 165-182
    • Lehmann, M.1
  • 27
    • 0036415306 scopus 로고    scopus 로고
    • Holographic setup for 2d-dopant profiling using the Lorentz lens. Microscopy and microanalysis 2002, Quebec City
    • Voelkl, E., Piston, D., Gauvin, R., Lockley, A.J., Bailey, G.W. & McKernan, S. (Eds.). New York: Cambridge University Press
    • Lehmann, M., Brand, K. & Lichte, H. (2002a). Holographic setup for 2d-dopant profiling using the Lorentz lens. Microscopy and microanalysis 2002, Quebec City, Microsopy and Microanalysis, Vol. 8, Suppl 2, 536CD-537CD. Voelkl, E., Piston, D., Gauvin, R., Lockley, A.J., Bailey, G.W. & McKernan, S. (Eds.). New York: Cambridge University Press.
    • (2002) Microsopy and Microanalysis , vol.8 , Issue.SUPPL. 2
    • Lehmann, M.1    Brand, K.2    Lichte, H.3
  • 28
    • 0012400476 scopus 로고    scopus 로고
    • Quantitative analysis of focal-series of off-axis electron holograms
    • Durban, South Africa. Engelbrecht, J., Sewell, T., Witcomb, M., Cross, R. & Richards, P. (Eds.). Onderstepoort, South Africa: Microscopy Society of Southern Africa
    • Lehmann, M., Geiger, D., Büscher, I., Zandbergen, H.W., Van Dyck, D. & Lichte, H. (2002b). Quantitative analysis of focal-series of off-axis electron holograms. In 15th Int. Congr. on Electron Microscopy ICEM15, Durban, South Africa, Vol. 3, pp. 279-280. Engelbrecht, J., Sewell, T., Witcomb, M., Cross, R. & Richards, P. (Eds.). Onderstepoort, South Africa: Microscopy Society of Southern Africa.
    • (2002) 15th Int. Congr. on Electron Microscopy ICEM15 , vol.3 , pp. 279-280
    • Lehmann, M.1    Geiger, D.2    Büscher, I.3    Zandbergen, H.W.4    Van Dyck, D.5    Lichte, H.6
  • 29
    • 0012360497 scopus 로고
    • Interactive computer-based holographic correction of aberrations
    • Jouffrey, B. & Colliex, C. (Eds.). Les Ulis, France: Les Editions de Physique
    • Lehmann, M. & Lichte, H. (1994). Interactive computer-based holographic correction of aberrations. In 13th Int Congr on Electron Microscopy, ICEM13, pp. 293-294. Jouffrey, B. & Colliex, C. (Eds.). Les Ulis, France: Les Editions de Physique.
    • (1994) 13th Int Congr on Electron Microscopy, ICEM13 , pp. 293-294
    • Lehmann, M.1    Lichte, H.2
  • 30
    • 0000067038 scopus 로고
    • Reconstructed wavefronts and communication theory
    • Leith, E. & Upatnieks, J. (1962). Reconstructed wavefronts and communication theory. J Opt Soc Am 52, 1123.
    • (1962) J Opt Soc Am , vol.52 , pp. 1123
    • Leith, E.1    Upatnieks, J.2
  • 31
    • 0012450444 scopus 로고
    • Stochastic limitations to phase and contrast determinations in electron holography
    • Seattle
    • Lenz, F. & Völkl, E. (1990). Stochastic limitations to phase and contrast determinations in electron holography. In Proc 12th Int Congress on Electron Microscopy (Seattle), pp. 228-229.
    • (1990) Proc 12th Int Congress on Electron Microscopy , pp. 228-229
    • Lenz, F.1    Völkl, E.2
  • 32
    • 0022900244 scopus 로고
    • Electron holography approaching atomic resolution
    • Lichte, H. (1986). Electron holography approaching atomic resolution, Ultramicroscopy 20, 293-304.
    • (1986) Ultramicroscopy , vol.20 , pp. 293-304
    • Lichte, H.1
  • 33
    • 0026244960 scopus 로고
    • Optimum focus for taking electron holograms
    • Lichte, H. (1991a). Optimum focus for taking electron holograms. Ultramicroscopy 38, 13-22.
    • (1991) Ultramicroscopy , vol.38 , pp. 13-22
    • Lichte, H.1
  • 34
    • 0002110722 scopus 로고
    • Electron image plane off-axis holography of atomic structures
    • Lichte, H. (1991b). Electron image plane off-axis holography of atomic structures. Adv Optical Electron Microsc 12, 25-91.
    • (1991) Adv Optical Electron Microsc , vol.12 , pp. 25-91
    • Lichte, H.1
  • 35
    • 0027619479 scopus 로고
    • Parameters for high-resolution electron holography
    • Lichte, H. (1993). Parameters for high-resolution electron holography. Ultramicroscopy 51, 15-20.
    • (1993) Ultramicroscopy , vol.51 , pp. 15-20
    • Lichte, H.1
  • 36
    • 0030221935 scopus 로고    scopus 로고
    • Electron holography: Optimum position of the biprism in the electron microscope
    • Lichte, H. (1996). Electron holography: Optimum position of the biprism in the electron microscope. Ultramicroscopy 64, 79-86.
    • (1996) Ultramicroscopy , vol.64 , pp. 79-86
    • Lichte, H.1
  • 37
    • 0033712426 scopus 로고    scopus 로고
    • Are ferroelectric crystals blaze-gratings for electrons?
    • Lichte, H. (2000). Are ferroelectric crystals blaze-gratings for electrons? Cryst Res Technol 35, 887-898.
    • (2000) Cryst Res Technol , vol.35 , pp. 887-898
    • Lichte, H.1
  • 38
    • 0034110033 scopus 로고    scopus 로고
    • Inelastic electron holography
    • Lichte, H. & Freitag, B. (2000). Inelastic electron holography. Ultramicroscopy 81, 177-186.
    • (2000) Ultramicroscopy , vol.81 , pp. 177-186
    • Lichte, H.1    Freitag, B.2
  • 39
    • 0027109802 scopus 로고
    • Electron holography: II. First steps of high resolution electron holography into materials science
    • Lichte, H., Völkl, E. & Scheerschmidt, K. (1992). Electron holography: II. First steps of high resolution electron holography into materials science. Ultramicroscopy 47, 231-240.
    • (1992) Ultramicroscopy , vol.47 , pp. 231-240
    • Lichte, H.1    Völkl, E.2    Scheerschmidt, K.3
  • 40
    • 34250925182 scopus 로고
    • Beobachtungen und messungen an biprisma-interferenzen mit elektronenwellen
    • Möllenstedt, G. & Düker, H. (1956). Beobachtungen und messungen an biprisma-interferenzen mit elektronenwellen, Zeitschrift für Physik 145, 377-397.
    • (1956) Zeitschrift für Physik , vol.145 , pp. 377-397
    • Möllenstedt, G.1    Düker, H.2
  • 41
    • 0000892875 scopus 로고
    • Elektronenholographie und rekonstruktion mit laserlicht
    • Möllenstedt, G. & Wahl, H. (1968). Elektronenholographie und rekonstruktion mit laserlicht. Naturwissenschaften 55, 340.
    • (1968) Naturwissenschaften , vol.55 , pp. 340
    • Möllenstedt, G.1    Wahl, H.2
  • 42
    • 0034107054 scopus 로고    scopus 로고
    • Construction and characterization of the fringe field monochromator for a field emission gun
    • Mook, H.W. & Kruit, P. (2000). Construction and characterization of the fringe field monochromator for a field emission gun. Ultramicroscopy 81, 129-139.
    • (2000) Ultramicroscopy , vol.81 , pp. 129-139
    • Mook, H.W.1    Kruit, P.2
  • 43
    • 0030221535 scopus 로고    scopus 로고
    • Direct structure reconstruction in HRTEM
    • Op de Beeck, M. & Van Dyck, D. (1996). Direct structure reconstruction in HRTEM. Ultramicroscopy 64, 153-165.
    • (1996) Ultramicroscopy , vol.64 , pp. 153-165
    • Op de Beeck, M.1    Van Dyck, D.2
  • 44
    • 0000029136 scopus 로고
    • Electron holography surmounts resolution limit of electron microscopy
    • Orchowski, A., Rau, W.D. & Lichte, H. (1995). Electron holography surmounts resolution limit of electron microscopy. Phys Rev Lett 74, 399-402.
    • (1995) Phys Rev Lett , vol.74 , pp. 399-402
    • Orchowski, A.1    Rau, W.D.2    Lichte, H.3
  • 45
    • 0002543912 scopus 로고
    • Real-time reconstruction of electron-off-axis holograms recorded with a high pixel CCD camera
    • Rau, W.-D., Lichte, H., Völkl, E. & Weierstall, U. (1991). Real-time reconstruction of electron-off-axis holograms recorded with a high pixel CCD camera. J Comput-Assist Microsc 3, 51-63.
    • (1991) J Comput-Assist Microsc , vol.3 , pp. 51-63
    • Rau, W.-D.1    Lichte, H.2    Völkl, E.3    Weierstall, U.4
  • 46
    • 0032620923 scopus 로고    scopus 로고
    • Two-dimensional mapping of the electrostatic potential in transistors by electron holography
    • Rau, W.D., Schwander, P., Baumann, F.H., Höppner, W. & Ourmazd, A. (1999). Two-dimensional mapping of the electrostatic potential in transistors by electron holography. Phys Rev Lett 82, 2614-2617.
    • (1999) Phys Rev Lett , vol.82 , pp. 2614-2617
    • Rau, W.D.1    Schwander, P.2    Baumann, F.H.3    Höppner, W.4    Ourmazd, A.5
  • 47
    • 0000743490 scopus 로고
    • Direct imaging of spatially varying potential and charge across internal interfaces in solids
    • Ravikumar, V., Rodrigues, R.P. & Dravid, V.P. (1995). Direct imaging of spatially varying potential and charge across internal interfaces in solids. Phys Rev Lett 75, 4063.
    • (1995) Phys Rev Lett , vol.75 , pp. 4063
    • Ravikumar, V.1    Rodrigues, R.P.2    Dravid, V.P.3
  • 48
    • 0002685951 scopus 로고
    • Outline of a spherically corrected semiaplanatic medium-voltage transmission electron microscope
    • Rose, H. (1990). Outline of a spherically corrected semiaplanatic medium-voltage transmission electron microscope. Optik 85, 19-24.
    • (1990) Optik , vol.85 , pp. 19-24
    • Rose, H.1
  • 49
    • 0002170585 scopus 로고
    • The theoretical resolution limit of the electron microscope
    • Scherzer, O. (1949). The theoretical resolution limit of the electron microscope. J Appl Phys 20, 20-29.
    • (1949) J Appl Phys , vol.20 , pp. 20-29
    • Scherzer, O.1
  • 52
    • 0017551489 scopus 로고
    • Richstrahlwertmessung an einem strahlerzeugungssystem mit feldemissionskathode
    • Speidel, R. & Kurz, D. (1977). Richstrahlwertmessung an einem strahlerzeugungssystem mit feldemissionskathode. Optik 49, 173.
    • (1977) Optik , vol.49 , pp. 173
    • Speidel, R.1    Kurz, D.2
  • 55
    • 0028821971 scopus 로고
    • A software package for the processing and reconstruction of electron holograms
    • Völkl, E., Allard, L.F. & Frost, B. (1995). A software package for the processing and reconstruction of electron holograms. J Microsc 180, 39-50.
    • (1995) J Microsc , vol.180 , pp. 39-50
    • Völkl, E.1    Allard, L.F.2    Frost, B.3
  • 57
    • 0012397720 scopus 로고    scopus 로고
    • The reconstruction of off-axis electron holograms
    • Völkl, E., Allard, L.F. & Joy, D.C. (Eds.). New York: Kluwer Academics/Plenum Publishers
    • Völkl, E. & Lehmann, M. (1999). The reconstruction of off-axis electron holograms. In Introduction to Electron Holography, Völkl, E., Allard, L.F. & Joy, D.C. (Eds.), pp. 125-151. New York: Kluwer Academics/Plenum Publishers.
    • (1999) Introduction to Electron Holography , pp. 125-151
    • Völkl, E.1    Lehmann, M.2
  • 58
    • 0025191540 scopus 로고
    • Electron holograms for subangström point resolution
    • Völkl, E. & Lichte, H. (1990). Electron holograms for subangström point resolution. Ultramicroscopy 32, 177-180.
    • (1990) Ultramicroscopy , vol.32 , pp. 177-180
    • Völkl, E.1    Lichte, H.2


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