Electron-beam-generated carrier distributions in semiconductor multilayer structures

Journal of Microscopy

Volumn 187, Issue 2, 1997, Pages 119-124

  Mohr, H ^a,b   Dunstan, D J ^a,c  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b University of London ^*  (Germany)

^c QUEEN MARY UNIVERSITY OF LONDON   (United Kingdom)

Author keywords

Depth close distribution; EBIC; Monte Carlo simulation; Multilayer structure

Indexed keywords

ELECTRONS; INTELLIGENT SYSTEMS; MONTE CARLO METHODS; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SURFACE DEFECTS;

A: SEMICONDUCTORS; ANALYTICAL METHOD; CARRIER DISTRIBUTIONS; CARRIER GENERATION; DEPTH-CLOSE DISTRIBUTION; EBIC; ELECTRON-BEAM; MONTE CARLO'S SIMULATION; MULTILAYER STRUCTURES; SEMICONDUCTOR MULTILAYERS;

ELECTRON BEAMS;

ARTICLE; CALCULATION; ELECTRON BEAM; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; SYSTEM ANALYSIS;

EID: 0030769846     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1997.2190778.x     Document Type: Article

References (15)

1. Dapor, M. (1990) Backscattering of electrons from solid targets. Phys. Lett. A. 151, 84-89.
2. Dapor, M. (1991) Penetration of an electron beam in a thin solid lilm: The influence of backscaltering from the substrate. Phys. Rev. B, 45, 10118-10123.
3. Dapor, M. (1992) Theory of the interaction between an electron beam and a thin solid lilm. Surf. Sci. B, 753-762.
4. Donolato, C. (1978) On the theory of SEM charge collection imaging of localised defects in semiconductors. Optik. 52, 19-36.
5. Everhart, T.E. & Hoff, P.H. (1971) Determination of kilovolt electron energy dissipation vs. penetration distance in solid materials. J. Appl. Phys. 42, 5857-5846.
6. Hénoc. J. & Maurice, E (1976) Characteristics of a Monte Carlo program for microanalysis study of Knergv loss. National Bureau of Standards Special Publication 460, p. 61.
7. Joy, D.C. (1986) The interpretation of EB5IC images using Monte-Carlo simulations. J. Microsc. 143, 233-248.
8. Joy, D.C. (1995) Monte Carlo Methods for Electron Microscopy and Micnmnalusis. Oxford University Press.
9. Kanaya, K. & Okayama, S. (1972) Penetration and energy-loss theory of electrons in solid targets. J. Phys. D. Appl. Phys. 5, 43-57
10. Klein, C.A. (1968) Bandgap dependence and related features of radiation ionisation energies in semiconductors. J. Appl. Phys. 59, 2029-2058.
11. Myklebust, R.L., Newbury, D.E. & Yakowitz, H. (1976) NBS Monte Carlo electron trajectory calculation program. National Bureau of Standards Special Publication. 460, 105-125.
12. Napchan, E. & Holt, D.B. (1987) Application of Monte Carlo simulations in the SEM study of hcterojunclions. Inst. Phys. Conf. Sci: 87, 733-738.
13. Newbury, D.H. & Myklebust, R.L., (1981) Monte Carlo electron trajectory calculations of electron interactions in samples with special geometries, Electron Beam interactions With Solids, pp. 155-163. SEM AMF O'Hare. Chicago.
14. Russ, J.C., Radzimski, Z.J., Buczkowski, A. & Maynard, L. (1990) Monte Carlo modelling of electron signals for heterogeneous specimens with nonplanar surfaces. J. Comput. Assisted Microsc. 2, 59.
15. Scott, V.D. & Love, G. (1985) Quantitative Electron-Probe Microanalysis. Ellis Horwood, Chichester.