Deep X-Ray Lithography

Micromanufacturing Engineering and Technology

Volumn , Issue , 2010, Pages 202-220

  Meyer, Pascal ^a   Schulz, Joachim ^b   Saile, Volker ^c  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b Institute of Microstructure Technology of the Forschungszentrum   (United Kingdom)

^c UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84882506333     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-0-8155-1545-6.00013-2     Document Type: Chapter

References (31)

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