DoseSim: Microsoft-windows graphical user interface for using synchrotron x-ray exposure and subsequent development in the LIGA process

Review of Scientific Instruments

Volumn 74, Issue 2, 2003, Pages 1113-1119

  Meyer, P ^a   Schulz, J ^a   Hahn, L ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; BANDWIDTH; ELECTROPLATING; GRAPHICAL USER INTERFACES; MICROSTRUCTURE; SURFACE ROUGHNESS; X RAY LITHOGRAPHY;

OPTICS CODES;

SYNCHROTRON RADIATION;

EID: 0037329626     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1532542     Document Type: Review

References (19)

1. J. Hruby, MRS Bull. 26, 337 (2001).
2. R. K. Kupka et al., Appl. Surf. Sci. 164, 97 (2000).
3. M. Sanchez del Rio and R. J. Dejus, Rev. Sci. Instrum. 67, 1 (1996).
4. M. Sanchez del Rio and R. J. Dejus, Proc. SPIE 3152, 148 (1997).
5. F. Cerrina and B. Lai, Nucl. Instrum. Methods Phys. Res. A 246, 337 (1986).
6. C. Welnak, G. J. Chen, and F. Cerrina, Nucl. Instrum. Methods Phys. Res. A 347, 344 (1994).
7. F. Cerrina, F. Baszler, S. Turner, and M. Khan, Microelectron. Eng. 21, 103 (1993).
8. F. Baszler, M. Khan, and F. Cerrina, Proc. SPIE 1671, 451 (1992).
9. H. Winick, Synchrotron Radiation Research (Plenium, New York, 1980), Chap. 2.
10. G. Margaritondo, Introduction to Synchrotron Radiation (Oxford University Press, New York, 1988), Chap. 2.2.
11. B. Maid, W. Ehrfeld, J. Hormes, J. Mohr, and D. Münchmeyer, Ph.D., Karlsruhe (1989).
12. E. B. Saloman, J. H. Hubbell, and J. H. Scofield, At. Data Nucl. Data Tables 38, 1 (1988).
13. W. M. J. Veigele, At. Data 5, 51 (1973).
14. B. L. Henke, P. Lee, T. J. Tanaka, R. L. Shimabukuro, and B. K. Fujikawa, At. Data Nucl. Data Tables 54, 181 (1993).
15. F. Pérennès and F. J. Pantenburg, Nucl. Instrum. Methods Phys. Res. B 174, 317 (2001).
16. F. Pérennès, E. Vesselli, and F. J. Pantenburg, Microsyst. Technol. 8, 330 (2002).
17. P. Meyer, A. El-Kholi, J. Mohr, C. Cremers, F. Bouamrane, and S. Megtert, Proc. SPIE 3874, 312 (1999).
18. P. Meyer, A. El-Kholi, and J. Schulz, Microelectron. Eng. 63, 319 (2002).
19. http://www.roehm.de/de/plexiglas/index.html