Study of the development behaviour of irradiated foils and microstructure

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 312-320

  Meyer, P ^a   El Kholi, A ^a   Mohr, J ^a   Cremers, C ^a   Bouamrane, F ^a   Megtert, S ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED SOFTWARE ENGINEERING; COMPUTER SIMULATION; DOSIMETRY; ELECTROPLATING; IRRADIATION; MICROSTRUCTURE; MOLDING; POLYMETHYL METHACRYLATES; X RAY LITHOGRAPHY; X RAYS;

HIGH ASPECT RATIO MICROSTRUCTURES;

LITHOGRAPHY;

EID: 0033309897     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)