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Volumn 6, Issue 5, 2013, Pages

Effects of sulfur passivation on GaSb metal-oxide-semiconductor capacitors with neutralized and unneutralized (NH4)2S solutions of varied concentrations

(6) Zhao, Lianfeng a Tan, Zhen a Bai, Rongxu b Cui, Ning a Wang, Jing a Xu, Jun a

a TSINGHUA UNIVERSITY (China)

b Beneq Oy Shanghai Representative Office (China)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACE TRAP DENSITY; METAL-OXIDE-SEMICONDUCTOR CAPACITORS; SULFUR PASSIVATION;

CAPACITORS; DIELECTRIC DEVICES; GALLIUM ALLOYS; PASSIVATION; SOLUTIONS;

SULFUR;

EID: 84880856742 PISSN: 18820778 EISSN: 18820786 Source Type: Journal
DOI: 10.7567/APEX.6.056502 Document Type: Article

Times cited : (24)

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