Atomic layer deposition of CdO and CdxZn1-xO films

Materials Chemistry and Physics

Volumn 140, Issue 2-3, 2013, Pages 465-471

  Bakke, Jonathan R ^a   Hägglund, Carl ^a   Jung, Hee Joon ^a   Sinclair, Robert ^a   Bent, Stacey F ^a  

^a Stanford University   (United States)

Author keywords

A. Alloys; A. Inorganic compounds; A. Oxides; A. Semiconductors; A. Thin film; D. Crystal structure; D. Optical properties

Indexed keywords

CRYSTALLOGRAPHIC INFORMATION; ELEMENTAL COMPOSITIONS; FILM SURFACES; HEXAGONAL CRYSTAL STRUCTURE; INDEX OF REFRACTION; POLYCRYSTALLINE GRAINS; RELATIVE RATIOS; SELECTED AREA DIFFRACTION;

CADMIUM ALLOYS; CRYSTAL STRUCTURE; DEPOSITION; FILM GROWTH; INORGANIC COMPOUNDS; OPTICAL CONSTANTS; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; TRANSMISSION ELECTRON MICROSCOPY; ZINC; ZINC ALLOYS; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84878295241     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2013.03.038     Document Type: Article

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