Nanoindentation behaviors of amorphous carbon films containing nanocrystalline graphite and diamond clusters prepared by radio frequency sputtering

Applied Surface Science

Volumn 273, Issue , 2013, Pages 816-823

  Fan, Xue ^a,b   Nose, Kenji ^c   Diao, Dongfeng ^a,d   Yoshida, Toyonobu ^b  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b UNIVERSITY OF TOKYO   (Japan)

^c INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^d SHENZHEN UNIVERSITY   (China)

Author keywords

Amorphous; Carbon film; Diamond; Graphite; Nanocrystalline; Nanoindentation

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS MATERIALS; DIAMONDS; FILM PREPARATION; GRAPHITE; ION BOMBARDMENT; NANOCRYSTALS; NANOINDENTATION; RADIO WAVES; SPUTTERING;

AMORPHOUS CARBON (A-C); DEPOSITION TEMPERATURES; NANO-CRYSTALLINE DIAMONDS; NANOCRYSTALLINE GRAPHITE; NANOCRYSTALLINES; NANOINDENTATION BEHAVIOR; RADIO FREQUENCY SPUTTERING; RADIO FREQUENCY SPUTTERING METHOD;

CARBON FILMS;

EID: 84876410682     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.03.012     Document Type: Article

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