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Journal of Applied Physics

Volumn 82, Issue 12, 1997, Pages 6024-6030

Stress-induced formation of high-density amorphous carbon thin films

(7) Schwan, J a,c Ulrich, S a Theel, T a Roth, H a Ehrhardt, H a Becker, P a Silva, S R P b

a FB Physik ^* (Germany)

b UNIVERSITY OF SURREY (United Kingdom)

c SAP RESEARCH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001445311 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.366469 Document Type: Article

Times cited : (118)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.