Deposition of hard elastic hydrogenated fullerenelike carbon films

Journal of Applied Physics

Volumn 109, Issue 10, 2011, Pages

  Wang, Zhou ^a   Zhang, Junyan ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BASAL PLANES; CHEMICAL VAPOR; ELASTIC RECOVERY; FULLERENE-LIKE STRUCTURES; HIGH HARDNESS; LOW TEMPERATURES; NON EQUILIBRIUM; PULSE PLASMAS; QUENCHING PROCESS;

CHEMICAL VAPOR DEPOSITION; FILM PREPARATION; HYDROGENATION; INDUSTRIAL APPLICATIONS; MECHANICAL PROPERTIES; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CARBON FILMS;

EID: 79958837642     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3590165     Document Type: Conference Paper

References (35)

1. Y. G. Gogotsi and M. Yoshimura, Nature 367, 628 (1994). 10.1038/367628a0 (Pubitemid 24069070)
2. H. Sjstrm, S. Stafstrm, M. Boman, and J. E. Sundgren, Phys. Rev. Lett. 75, 1336 (1995). 10.1103/PhysRevLett.75.1336
3. G. A. J. Amaratunga, M. Chhowalla, C. J. Kiely, I. Alexandrou, R. Aharonov, and R. M. Devenish, Nature 383, 321 (1996). 10.1038/383321a0 (Pubitemid 26321757)
4. D. R. McKenzie, D. Muller, and B. A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991). 10.1103/PhysRevLett.67.773
5. J. G. Buijnsters, M. Camero, R. Gago, A. R. Landa-Canovas, C. Gomez-Aleixandre, and I. Jimenez, Appl. Phys. Lett. 92, 141920 (2008). 10.1063/1.2903502 (Pubitemid 351535604)
6. C. Wang, S. Yang, Q. Wang, Z. Wang, and J. Zhang, Nanotechnology 19, 225709 (2008). 10.1088/0957-4484/19/22/225709 (Pubitemid 351652171)
7. Q. Wang, C. Wang, Z. Wang, J. Zhang, and D. He, Appl. Phys. Lett. 93, 131920 (2008). 10.1063/1.2996273
8. H. Konno, T. Nakahashi, and M. Inagaki, Carbon 35, 669 (1997). 10.1016/S0008-6223(97)00022-5
9. G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909). 10.1098/rspa.1909.0021
10. J. Neidhardt, L. Hultman, and Z. Czigny, Carbon 42, 2729 (2004). 10.1016/j.carbon.2004.06.011
11. Q. Wang, C. Wang, Z. Wang, J. Zhang, and D. He, Appl. Phys. Lett. 91, 141902 (2007). 10.1063/1.2794017 (Pubitemid 47531481)
12. R. Gago, G. Abrasonis, A. Mcklich, W. Mller, Z. Czigny, and G. Radnczi, Appl. Phys. Lett. 87, (2005). 10.1063/1.2008366 (Pubitemid 41230632)
13. J. Neidhardt and L. Hultman, J. Vac. Sci. Technol. A 25, 633 (2007). 10.1116/1.2738505 (Pubitemid 47142874)
14. J. Robertson, Mater. Sci. Eng. R. 37, 129 (2002). 10.1016/S0927-796X(02) 00005-0
15. Z. Czigany, I. F. Brunell, J. Neidhardt, L. Hultman, and K. Suenaga, Appl. Phys. Lett. 79, 2639 (2001). 10.1063/1.1412596
16. C. Casiraghi, A. C. Ferrari, and J. Robertson, Phys. Rev. B 72, 085401 (2005). 10.1103/PhysRevB.72.085401 (Pubitemid 41509235)
17. J. Filik, P. W. May, S. R. J. Pearce, R. K. Wild, and K. R. Hallam, Diamond Relat. Mater. 12, 974 (2003). 10.1016/S0925-9635(02)00374-6 (Pubitemid 36615397)
18. A. C. Ferrari and J. Robertson, Phys. Rev. B 61, 14095 (2000). 10.1103/PhysRevB.61.14095
19. V. D. Blank, S. G. Buga, G. A. Dubitsky, N. R. Serebryanaya, M. Y. Popov, and B. Sundqvist, Carbon 36, 319 (1998). 10.1016/S0008-6223(97)00234-0
20. J. Diaz, J. A. M. Gago, S. Ferrer, F. Comin, L. Abello, and G. Lucazeau, Diamond Relat. Mater. 1, 824 (1992). 10.1016/0925-9635(92)90108-Z
21. D. S. Bethune, G. Meijer, W. C. Tang, H. J. Rosen, W. G. Golden, H. Seki, C. A. Brown, and M. S. de Vries, Chem. Phys. Lett. 179, 181 (1991). 10.1016/0009-2614(91)90312-W
22. C. Wang, S. Yang, H. Li, and J. Zhang, J. Appl. Phys. 101, 013501 (2007). 10.1063/1.2402477 (Pubitemid 46120610)
23. D. Roy, M. Chhowalla, N. Hellgren, T. W. Clyne, and G. A. J. Amaratunga, Phys. Rev. B 70, 035406 (2004). 10.1103/PhysRevB.70.035406
24. D. Roy, M. Chhowalla, H. Wang, N. Sano, I. Alexandrou, T. W. Clyne, and G. A. J. Amaratunga, Chem. Phys. Lett. 373, 52 (2003). 10.1016/S0009-2614(03) 00523-2 (Pubitemid 36567400)
25. I. Alexandrou, H. J. Scheibe, C. J. Kiely, A. J. Papworth, G. A. J. Amaratunga, and B. Schultrich, Phys. Rev. B 60, 10903 (1999). 10.1103/PhysRevB.60.10903
26. J. G. Buijnsters, M. Camero, L. Vzquez, F. Agull-Rueda, R. Gago, I. Jiménez, C. Gmez-Aleixandre, and J. M. Albella, Diam. Relat. Mater. 19, 1093 (2010). 10.1016/j.diamond.2010.03.017
27. L. Ji, H. Li, F. Zhao, W. Quan, J. Chen, and H. Zhou, J. Appl. Phys. 105, 106113 (2009). 10.1063/1.3125528
28. J. Neidhardt, Z. Czigany, I. F. Brunell, and L. Hultman, J. Appl. Phys. 93, 3002 (2003). 10.1063/1.1538316
29. D. Ugarte, Nature 359, 707 (1992). 10.1038/359707a0
30. J. Ullmann, P. Heger, K. Pinkert, and K. Baba, Nucl. Instrum. Methods Phys. Res. B 106, 96 (1995). 10.1016/0168-583X(95)00685-0
31. S. Stlen and T. Grande, Chemical Thermodynamics of Materials (Wiley, Chichester, UK, 2004), p. 3.
32. J. B. Howard, K. D. Chowdhury, and J. B. V. Sande, Nature 370, 603 (1994). 10.1038/370603a0 (Pubitemid 24270671)
33. J. B. Howard, J. T. McKinnon, Y. Makarovsky, A. L. Lafleur, and M. E. Johnson, Nature 352, 139 (1991). 10.1038/352139a0
34. E. Neyts, A. Bogaerts, and M. C. M. van de Sanden, Appl. Phys. Lett. 88, 141922 (2006). 10.1063/1.2193803 (Pubitemid 43731470)
35. A. C. Ferrari, A. Libassi, B. K. Tanner, V. Stolojan, J. Yuan, L. M. Brown, S. E. Rodil, B. Kleinsorge, and J. Robertson, Phys. Rev. B 62, 11089 (2000). 10.1103/PhysRevB.62.11089 (Pubitemid 32367282)