Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering

Surface and Coatings Technology

Volumn 205, Issue 8-9, 2011, Pages 3058-3065

  Wang, Yongjun ^a,b   Li, Hongxuan ^a   Ji, Li ^a   Zhao, Fei ^c   Kong, Qinghua ^a,b   Wang, Yongxia ^a,b   Liu, Xiaohong ^a   Quan, Weilong ^a,b   Zhou, Huidi ^a   Chen, Jianmin ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c HENAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Bias voltage; Graphite like carbon film; Microstructure; Tribological properties; Unbalanced magnetron sputtering

Indexed keywords

CRITICAL LOAD; INTERNAL STRESS; MECHANICAL AND TRIBOLOGICAL PROPERTIES; MICROSTRUCTURE AND PROPERTIES; OPTIMUM VALUE; STAINLESS STEEL SUBSTRATES; TRIBOLOGICAL EXPERIMENTS; TRIBOLOGICAL PROPERTIES; UNBALANCED MAGNETRON SPUTTERING;

AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBON FILMS; GRAPHITE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MICROSTRUCTURE; RAMAN SPECTROSCOPY; STAINLESS STEEL; SURFACE ROUGHNESS; TRIBOLOGY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

BIAS VOLTAGE;

EID: 78650225103     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.11.019     Document Type: Article

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