Mass and energy measurements of the species responsible for cBN growth in rf bias sputter conditions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 2859-2863

  Tsuda, Osamu ^a   Tatebayashi, Yoshinao ^a   Yamada Takamura, Yukiko ^a   Yoshida, Toyonobu ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031525615     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580840     Document Type: Article

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