Growth and characteristics of diamond-like carbon films with titanium and titanium nitride functional layers by cathode arc plasma

Surface and Coatings Technology

Volumn 223, Issue , 2013, Pages 17-23

  Zhou, Bing ^a,b   Jiang, Xiaohong ^a   Rogachev, A V ^b   Sun, Dongping ^a   Zang, Xiaowei ^c  

^a NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b FRANCISK SKORINA GOMEL STATE UNIVERSITY   (Belarus)

^c MENDELEEV UNIVERSITY OF CHEMICAL TECHNOLOGY OF RUSSIA   (Russian Federation)

Author keywords

Bilayer; Diamond like carbon; Diffusion; Functional layer; Mechanical property

Indexed keywords

ATOMIC REARRANGEMENTS; BI-LAYER; CATHODE ARC PLASMA; DIAMOND-LIKE CARBON; FUNCTIONAL LAYER; SIGNIFICANT DIFFERENCES; STRUCTURE FEATURES; SURFACE PROFILOMETERS;

ANNEALING; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CARBON CLUSTERS; CARBON FILMS; CATHODES; DIAMONDS; DIFFUSION; HARDNESS; MECHANICAL PROPERTIES; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

TITANIUM NITRIDE;

EID: 84875949459     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2013.02.020     Document Type: Article

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