Structure and mechanical properties of Ti alloyed DLC films

Wuji Cailiao Xuebao/Journal of Inorganic Materials

Volumn 17, Issue 4, 2002, Pages 771-776

  Jiang, Xiao Hong ^a   Rogachev, A V ^a   Lu, Xiao Hua ^a   Jin, Yuan Sheng ^a  

^a NANJING TECH UNIVERSITY   (China)

Author keywords

DLC film; Performance analysis; Thin film deposition

Indexed keywords

ALLOYING; CARBON; DEPOSITION; MECHANICAL PROPERTIES; MICROHARDNESS; STRUCTURE (COMPOSITION); THIN FILMS; TITANIUM; X RAY DIFFRACTION;

DUAL EXCITATION ENERGY SOURCE; TIC PHASE;

DIAMOND LIKE CARBON FILMS;

EID: 0036658728     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)