Preparation of superhard amorphous carbon films with low internal stress

Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 268-273

  Weissmantel, Steffen ^a   Reisse, Günter ^a   Rost, Dirk ^a  

^a UNIVERSITY OF APPLIED SCIENCES MITTWEIDA   (Germany)

Author keywords

Mechanical properties; Pulsed laser deposition (PLD); Stress relaxation; Tetrahedral amorphous carbon (ta C)

Indexed keywords

ANNEALING; CARBON; COMPRESSIVE STRESS; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; EXCIMER LASERS; INDENTATION; KINETIC ENERGY; LASER PULSES; MICROHARDNESS; PULSED LASER APPLICATIONS; RESIDUAL STRESSES; VICKERS HARDNESS TESTING;

AMORPHOUS CARBON FILMS; LASER PULSE ENERGY; PULSED LASER ANNEALING; VICKER MICROHARDNESS;

AMORPHOUS FILMS;

COATING;

EID: 14644412842     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.08.070     Document Type: Article

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