SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 19, Issue 7-9, 2010, Pages 1034-1039

Structure and characterization of the multilayered Ti-DLC films by FCVA

(6) Lin, Yu Hung a Lin, Hong Da a Liu, Chun Kuo a Huang, Meng Wen b Chen, Jiann Ruey a Shih, Han C a,c

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

b NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

c CHINESE CULTURE UNIVERSITY (Taiwan)

Author keywords

Diamond like carbon (DLC); Filtered cathodic vacuum arc (FCVA); Ti DLC

Indexed keywords

AMORPHOUS CARBON MATRIX; ATOMIC CONCENTRATION; DIAMOND-LIKE CARBON; DLC FILM; ELECTRICAL RESISTIVITY; FILM MICROSTRUCTURES; FILTERED CATHODIC VACUUM ARC; GRAPHITE TARGET; HIGH HARDNESS; MECHANICAL STRENGTH; MULTI-LAYERED; MULTI-LAYERED STRUCTURE; SI SUBSTRATES; SIMPLE APPROACH; SOLID LUBRICANT COATINGS; WEAR-RESISTANT;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; DIAMONDS; ELECTRIC CONDUCTIVITY; MECHANICAL PROPERTIES; MICROSTRUCTURE; SOLID LUBRICANTS; SURFACE PROPERTIES; SURFACE ROUGHNESS; SYNTHETIC DIAMONDS; TITANIUM; TITANIUM CARBIDE; VACUUM; VACUUM APPLICATIONS; VACUUM TECHNOLOGY;

DIAMOND LIKE CARBON FILMS;

EID: 77955230445 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2010.02.014 Document Type: Article

Times cited : (44)

References (36)

1
- 0032614255
- A. Grill Diamond Relat. Mater. 8 1999 428
- (1999) Diamond Relat. Mater. , vol.8 , pp. 428
- Grill, A.¹

2
- 0032594147
- Y. Lifshitz Diamond Relat. Mater. 8 1999 1659
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1659
- Lifshitz, Y.¹

3
- 0000715415
- S. Sattel, and J. Robertson H. Ehrhardt. J. Appl. Phys. 82 1997 4566
- (1997) H. Ehrhardt. J. Appl. Phys. , vol.82 , pp. 4566
- Sattel, S.¹ Robertson, J.²

4
- 0026816817
- J. Robertson Surf. Coat. Technol. 50 1992 185
- (1992) Surf. Coat. Technol. , vol.50 , pp. 185
- Robertson, J.¹

5
- 21544477786
- F. Ruiz, W.D. Sun, F.H. Pollak, and C. Venkatraman Appl. Phys. Lett. 73 1998 1802
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1802
- Ruiz, F.¹ Sun, W.D.² Pollak, F.H.³ Venkatraman, C.⁴

6
- 33745256172
- N. Boutroy, Y. Pernel, J.M. Rius, F. Auger, H.J. von Bardeleben, J.L. Cantin, F. Abel, A. Zeinert, C. Casiraghi, A.C. Ferrari, and J. Robertson Diamond Relat. Mater. Des. 15 2006 921
- (2006) Diamond Relat. Mater. Des. , vol.15 , pp. 921
- Boutroy, N.¹ Pernel, Y.² Rius, J.M.³ Auger, F.⁴ Von Bardeleben, H.J.⁵ Cantin, J.L.⁶ Abel, F.⁷ Zeinert, A.⁸ Casiraghi, C.⁹ Ferrari, A.C.¹⁰ Robertson, J.¹¹

7
- 0001228085
- D.P. Dowling, P.V. Kola, K. Donnelly, T.C. Kelly, K. Brumitt, L. Lloyd, R. Eloy, M. Therin, and N. Weill Diamond Relat. Mater. 6 1997 390
- (1997) Diamond Relat. Mater. , vol.6 , pp. 390
- Dowling, D.P.¹ Kola, P.V.² Donnelly, K.³ Kelly, T.C.⁴ Brumitt, K.⁵ Lloyd, L.⁶ Eloy, R.⁷ Therin, M.⁸ Weill, N.⁹

8
- 0000425471
- S.R.P. Silva, J. Robertson, and G.A.J. Amaratunga J. Appl. Phys. 81 1997 2626
- (1997) J. Appl. Phys. , vol.81 , pp. 2626
- Silva, S.R.P.¹ Robertson, J.² Amaratunga, G.A.J.³

9
- 3142691250
- J. Li, W. Zheng, C. Gu, Z. Jin, Y. Zhao, X. Mei, Z. Mu, C. Dong, and C. Sun Carbon 42 2004 2309
- (2004) Carbon , vol.42 , pp. 2309
- Li, J.¹ Zheng, W.² Gu, C.³ Jin, Z.⁴ Zhao, Y.⁵ Mei, X.⁶ Mu, Z.⁷ Dong, C.⁸ Sun, C.⁹

10
- 56949087481
- Y.H. Lin, Y.C. Syue, H.D. Lin, U.S. Chen, Y.S. Chang, J.R. Chen, and H.C. Shih Appl. Surf. Sci. 255 2008 2139
- (2008) Appl. Surf. Sci. , vol.255 , pp. 2139
- Lin, Y.H.¹ Syue, Y.C.² Lin, H.D.³ Chen, U.S.⁴ Chang, Y.S.⁵ Chen, J.R.⁶ Shih, H.C.⁷

11
- 13544260604
- W.J. Hsieh, S.H. Lai, L.H. Chan, K.L. Chang, and H.C. Shih Carbon 43 2005 820
- (2005) Carbon , vol.43 , pp. 820
- Hsieh, W.J.¹ Lai, S.H.² Chan, L.H.³ Chang, K.L.⁴ Shih, H.C.⁵

12
- 13444306418
- L. Cui, L. Guoqing, C. Wenwu, M. Zongxin, Z. Chengwu, and W. Liang Thin Solid Films 475 2005 279
- (2005) Thin Solid Films , vol.475 , pp. 279
- Cui, L.¹ Guoqing, L.² Wenwu, C.³ Zongxin, M.⁴ Chengwu, Z.⁵ Liang, W.⁶

13
- 9644275585
- W.J. Hsieh, C.C. Lin, U.S. Chen, Y.S. Chang, and H.C. Shih Diamond Relat. Mater. 14 2005 93
- (2005) Diamond Relat. Mater. , vol.14 , pp. 93
- Hsieh, W.J.¹ Lin, C.C.² Chen, U.S.³ Chang, Y.S.⁴ Shih, H.C.⁵

14
- 0000682477
- W.J. Meng, T.J. Curtis, L.E. Rehn, and P.M. Baldo J. Appl. Phys. 83 1998 6076
- (1998) J. Appl. Phys. , vol.83 , pp. 6076
- Meng, W.J.¹ Curtis, T.J.² Rehn, L.E.³ Baldo, P.M.⁴

15
- 50349085492
- Y.K. Cho, W.S. Jang, S. Yoo, S.G. Kim, and S.W. Kim Surf. Coat. Technol. 202 2008 5390
- (2008) Surf. Coat. Technol. , vol.202 , pp. 5390
- Cho, Y.K.¹ Jang, W.S.² Yoo, S.³ Kim, S.G.⁴ Kim, S.W.⁵

16
- 17644435118
- J.S. Chen, S.P. Lau, Z. Sun, G.Y. Chen, Y.J. Li, B.K. Tay, and J.W. Chai Thin Solid Films 398 2001 110
- (2001) Thin Solid Films , vol.398 , pp. 110
- Chen, J.S.¹ Lau, S.P.² Sun, Z.³ Chen, G.Y.⁴ Li, Y.J.⁵ Tay, B.K.⁶ Chai, J.W.⁷

17
- 0036644871
- K.W. Weng, C.L. Chang, and D.Y. Wang Diamond Relat. Mater. 11 2002 1447
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1447
- Weng, K.W.¹ Chang, C.L.² Wang, D.Y.³

18
- 33646438383
- A.Y. Wang, K.R. Lee, J.P. Ahn, and J.H. Han Carbon 44 2006 1826
- (2006) Carbon , vol.44 , pp. 1826
- Wang, A.Y.¹ Lee, K.R.² Ahn, J.P.³ Han, J.H.⁴

19
- 0000435970
- A.A. Voevodin, S.V. Prasad, and J.S. Zabinski J. Appl. Phys. 82 1997 855
- (1997) J. Appl. Phys. , vol.82 , pp. 855
- Voevodin, A.A.¹ Prasad, S.V.² Zabinski, J.S.³

20
- 33644988732
- W.Y. Wu, and J.M. Ting Carbon 44 2006 1210
- (2006) Carbon , vol.44 , pp. 1210
- Wu, W.Y.¹ Ting, J.M.²

21
- 0036792915
- S.J. Park, K.R. Lee, D.H. Ko, and K.Y. Eun Diamond Relat. Mater. 11 2002 1747
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1747
- Park, S.J.¹ Lee, K.R.² Ko, D.H.³ Eun, K.Y.⁴

22
- 0038807569
- K. Baba, and R. Hatada Surf. Coat. Technol. 169 2003 287
- (2003) Surf. Coat. Technol. , vol.169 , pp. 287
- Baba, K.¹ Hatada, R.²

23
- 13844255015
- A.D. Liu, H.X. Zhang, and T.H. Zhang Surf. Coat. Technol. 193 2005 65
- (2005) Surf. Coat. Technol. , vol.193 , pp. 65
- Liu, A.D.¹ Zhang, H.X.² Zhang, T.H.³

24
- 33645007000
- C.C. Lin, W.J. Hsieh, J.H. Lin, U.S. Chen, X.J. Guo, and H.C. Shih Surf. Coat. Technol. 200 2006 5052
- (2006) Surf. Coat. Technol. , vol.200 , pp. 5052
- Lin, C.C.¹ Hsieh, W.J.² Lin, J.H.³ Chen, U.S.⁴ Guo, X.J.⁵ Shih, H.C.⁶

25
- 0037165927
- J. Robertson Mater. Sci. Eng. R 37 2002 129
- (2002) Mater. Sci. Eng. R , vol.37 , pp. 129
- Robertson, J.¹

26
- 50349094125
- P.C. Tsai, Y.F. Hwang, J.Y. Chiang, and W.J. Chen Surf. Coat. Technol. 202 2008 5350
- (2008) Surf. Coat. Technol. , vol.202 , pp. 5350
- Tsai, P.C.¹ Hwang, Y.F.² Chiang, J.Y.³ Chen, W.J.⁴

27
- 0242603790
- A.C. Ferrari, and J. Robertson Phys. Rev. B 61 2000 14095
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

28
- 56949091603
- H.S. Zhang, J.L. Endrino, and A. Anders Appl. Surf. Sci. 255 2008 2551
- (2008) Appl. Surf. Sci. , vol.255 , pp. 2551
- Zhang, H.S.¹ Endrino, J.L.² Anders, A.³

29
- 0347949958
- C. Casiraghi, A.C. Ferrari, R. Ohr, A.J. Flewitt, D.P. Chu, and J. Robertson Phys. Rev. Lett. 91 2003 226104
- (2003) Phys. Rev. Lett. , vol.91 , pp. 226104
- Casiraghi, C.¹ Ferrari, A.C.² Ohr, R.³ Flewitt, A.J.⁴ Chu, D.P.⁵ Robertson, J.⁶

30
- 18444405885
- C. Corbella, G. Oncins, M.A. Gómez, M.C. Polo, E. Pascual, J. García-Céspedes, J.L. Andújar, and E. Bertran Diamond Relat. Mater. 14 2005 1103
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1103
- Corbella, C.¹ Oncins, G.² Gómez, M.A.³ Polo, M.C.⁴ Pascual, E.⁵ García-Céspedes, J.⁶ Andújar, J.L.⁷ Bertran, E.⁸

31
- 0035449980
- H. Yoshikawa, C. Morel, and Y. Koga Diamond Relat. Mater. 10 2001 1588
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1588
- Yoshikawa, H.¹ Morel, C.² Koga, Y.³

32
- 0342643198
- C.W. Chen, and J. Robertson Mater. Res. Soc. Symp. Proc. 498 1998 31
- (1998) Mater. Res. Soc. Symp. Proc. , vol.498 , pp. 31
- Chen, C.W.¹ Robertson, J.²

33
- 0032473185
- S.L. Sung, X.J. Guo, K.P. Huang, F.R. Chen, and H.C. Shih Thin Solid Films 315 1998 345
- (1998) Thin Solid Films , vol.315 , pp. 345
- Sung, S.L.¹ Guo, X.J.² Huang, K.P.³ Chen, F.R.⁴ Shih, H.C.⁵

34
- 0029163870
- H. Holleck, and V. Schier Surf. Coat. Technol. 76/77 1995 328
- (1995) Surf. Coat. Technol. , vol.7677 , pp. 328
- Holleck, H.¹ Schier, V.²

35
- 33646246208
- F. Gao Phys. Rev. B 73 2006 132104
- (2006) Phys. Rev. B , vol.73 , pp. 132104
- Gao, F.¹

36
- 0030110155
- T.A. Friedmann, K.F. McCarty, J.C. Barbour, M.P. Siegal, and D.C. Dibble Appl. Phys. Lett. 68 1996 1643
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1643
- Friedmann, T.A.¹ McCarty, K.F.² Barbour, J.C.³ Siegal, M.P.⁴ Dibble, D.C.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.