Quantum electronic mechanisms of atomic rearrangements during growth of hard carbon films

Surface and Coatings Technology

Volumn 206, Issue 4, 2011, Pages 703-726

  Neuville, Stéphane ^a  

^a Tetrahedral Carbon Engineering   (France)

Author keywords

Catalytic growth effects; Diamond nucleation; Diamond, ta C, DLC, Carbon nano particles; Raman peak assignments; Validation of Film material growth criterion

Indexed keywords

ATOMIC REARRANGEMENTS; CARBON ATOMS; CATALYTIC EFFECTS; CATALYTIC GROWTH; DIAMOND NUCLEATION; DIAMOND-LIKE; DIAMOND-LIKE CARBON; ELECTRON HOLE PAIRS; ELECTRONIC ACTIVATION; ELECTRONIC MECHANISMS; ION IMPACT; RAMAN PEAK; TA-C FILM; TETRAHEDRAL AMORPHOUS CARBON; THERMAL SPIKES; TRANSIENT POLARIZATION; VALIDATION OF FILM MATERIAL GROWTH CRITERION;

ACTIVATION ENERGY; AMORPHOUS CARBON; AMORPHOUS FILMS; ATOMIC SPECTROSCOPY; ATOMS; COATINGS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ION BOMBARDMENT; QUANTUM ELECTRONICS; RAMAN SPECTROSCOPY;

CARBON FILMS;

EID: 80054094070     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.07.055     Document Type: Article

References (107)

1. Rats D., Vandenbulcke L., Boher C., Farges G. Surf. Coat. Technol. 1997, 94-95:555.
2. Haubold L., Becker M., Schuelke T., Kleemann C., Scheibe H., Hinueber C., Friedrichs R., Hoefing E., Baumann M. 51st Annual Technical Conference Proceedings 2008, Society of Vacuum Coaters.
3. Scheibe H.J., Klaffke D. Surf. Coat. Technol. 1993, 57:111.
4. Shi X., Tay B.K., Lau S.P. Int. J. Mod. Phys. B 2000, 14(2-3):136.
5. Weissmantel S., Reisse G., Rost D. Surf. Coat. Technol. 2004, 188-189:268.
6. Neuville S., Matthews A. Thin Solid Films 2007, 515:6619.
7. Charitidis C.A. Int. J. Refract. Metals Hard Mater. 2010, 28:51.
8. Neuville S. JPJSS 2009, 3(1):33.
9. Neuville S. JPJSS 2009, 3(3):177.
10. Leyland A., Matthews A. Wear 2000, 246:1.
11. Neidhardt J., Czigany Zs., Hultman L. Surf. Eng. 2003, 19(4):299.
12. Lifshitz Y. Proceedings School of Physics, Enrico Fermi CXXXV 1997, 10S Press Amsterdam.
13. Hurkmans A., Lewis D.B., Münz W.-D. Surf. Eng. 2003, 19(Part 3):205.
14. Neuville S. JPJSS 2008, 2(1):1.
15. Shriver D.F., Atkins P.W., Langford C.H. Inor. Chem. 1989, 337. Oxford University Press, New York.
16. Casiraghi C., Piazza F., Ferrari A.C., Grambole D., Robertson J. Diamond Relat. Mater. 2005, 14:1098.
17. Dischler B. EMRS Meeting XVII 1987, 189.
18. Oliver W.C., Pharr G.M. J. Mater. Res. 1992, 7:1564.
19. Fischer-Cripps A.C. Surf. Coat. Technol. 2006, 200:4153.
20. Korsunsky A.M., Mc Gurk M.R., Bull S.J., Page T.F. Surf. Coat. Technol. 1998, 99(1-2):171.
21. Donnet C., Erdemir A. Tribology of DLC 2008, Springer, New York.
22. Stoney G.G. Proc. R. Soc. Lond. A 1909, 82:172.
23. Pauleau Y. Tribology of DLC 2008, 102. Springer, New York. C. Donnet, A. Erdemir (Eds.).
24. Fabisiak F., Marciniak W., Orzesko S., Roszloch F. Diamond Relat. Mater. 1992, 1:83.
25. Yuasa M., Araki O., Ma J.S., Hiraki A., Kawanada H. Diamond Relat. Mater. 1992, 1:168.
26. Mac Namara K.M., Gleason K.K., Vestyck G.J., Butler J.E. Diamond Relat. Mater. 1992, 1:1145.
27. Siegbahn K., Nordling C., Fahlmann A., Nordberg R., Hamrin K., Hedman J., Johansson G., Bergmark T., Karlsson S.E., Lindgren I., Lindberg B. ESCA, Almqvist & Wikselis 1967, Bocktryckeri Ali, Uppsala.
28. Bounouh Y., Chaded L., Sadki A., Theye M.L., Cardinaud C., Zarrabian M., von Bardeleben J., Zellama K., Cernogora J., Fave J.L. Diamond Relat. Mater. 1995, 4:712.
29. Ferrari A.C. Diamond Relat. Mater. 2002, 11:440.
30. Rodil S.E., Muhl S. Diamond Relat. Mater. 2004, 13:1521.
31. Sharma S.C., Green M., Hyer R.C., Dark C.A., Black T.D., Chourasia A.R., Chopra D.R., Mishra K.K. J. Mater. Res. 1990, 5(11):2424.
32. Huong P.V. Diamond Relat. Mater. 1991, 1:33.
33. Fayette L., Marcus B., Mermoux M., Tourillon G., Laffon K., Parent P., Le Normand F. Phys. Rev. B 1998, 57(22):1412.
34. Rammamurti R., Shanov V., Singh R.N., Mamedov S., Boolchand P. J. Vac. Sci. Technol. 2006, A24(2):179.
35. Iwaki M., Takahashi K., Sekiguchi A. J. Mater. Res. 1990, 5:562.
36. Wagner J., Ramsteiner M., Wild C., Koidl P. Les editions de la Physique 1987, 219. Proceedings by. P. Koidl, P. Oelhafen (Eds.).
37. Beeman D., Silvermann J., Lynds R., Anderson M.R. Phys. Rev. 1984, B30:870.
38. Robertson J., O'Really E.P. Phys. Rev. B 1987, 35:2946.
39. Yokota Y., Kotsuka H., Sogi T., Ma J.S., Hiraki A., Matsuda K., Hatada M. Diamond Relat. Mater. 1992, 1:470.
40. Wang X.H., Ma G.H.M., Zhu W., Glass J.T., Bergman L., Turner K.F., Nemanich R.J. Diamond Relat. Mater. 1992, 1:828.
41. Anders S., Ager J.W., Pharr G.M., Tsui T.Y., Brown I.G. Thin Solid Films 1997, 308-309:186.
42. Spear K.E., Phelps A.W., White W.B. J. Mater. Res. 1990, 5(11):2277.
43. Nimmagadda R.R., Joshi A., Hsu L. J. Mater. Res. 1990, 5:2445.
44. Eto H., Tamou Y., Ohsawa Y., Kikuchi N. Diamond Relat. Mater. 1992, 1:373.
45. Jayatissa A.H., Saito N., Sato F., Takizawa K. J. Vac. Sci. Technol. 1998, A16(2):666.
46. Nepsha V.I., Greenberg V.R., Klyuev Y.A., Kolchemanov N.A., Naletov A.M. Diamond Relat. Mater. 1992, 1:891.
47. Reyes-Mena A., Gonzales-Hernandez J., Asomoza R. Les Editions de la Physique 1987, 229. Proceedings by. P. Koidl, P. Oelhafen (Eds.).
48. Liu D.G., Tu J.P., Hong C.F., Gu C.D., Mao S.X. Surf. Coat. Technol. 2010, 205:152.
49. Liu Y.Y., Wei H.W., Leou K.C., Lin H., Tung C.H., Wei M.T., Lin C., Tsai C.H. J. Vac. Sci. Technol. B 2006, 24(1):97.
50. Hellgren N., Johanson M.P., Broitman E., Hultmann L., Sundgreen J.E. Phys. Rev. B 1999, 59(7):5162.
51. Scheuerlein C., Taborelli M., Hilleret N., Brown A., Backer M.A. Appl. Surf. Sci. 2002, 202:57.
52. Demichelis F., Piri C.F., Taggliaferro A. Diamond Relat. Mater. 1992, 1:298.
53. Liberman M.A., Lichtenberg J. Principle of Plasma Discharges and Material Processing 1994, J. Wiley &Sons, Inc., New York.
54. E. Vietzke, V. Philips, K. Flaschkamp, C. Wild, EMRS Meeting XVII, Proceedings by P.Koidl and P.Oelhafen, Les editions de la Physique (eds) (1987) 351.
55. Robertson J. Adv. Phys. 1986, 35:317.
56. Harris S.J., Martin L.R. J. Mater. Res. 1990, 5(11):2313.
57. Liu D.G., Tu J.P., Zhang H., Chen R., Gu C.D. Surf. Coat. Technol. 2011, 205(8-9):380. (2010) 162.
58. Holloway B.C., Kraft O., Shuh D.K., Kelly M.A., Nix W.D., Pianetta P., Hangström S. Appl. Phys. Lett. 1990, 74(22):3290.
59. Ohl A., Röpke J. Diamond Relat. Mater. 1992, 1:243.
60. Ackerman Z.I., Yang H., Smith J.F.W. J. Appl. Phys. 1996, 80(5):3068.
61. Le Normand F. Phys. Rev. 2001, B64:235.
62. Gouzmann I., Breuer R., Hofmann A. Surf. Sci. 1995, 331:283.
63. Ravi K.V., Koch C.A., Hu H.S., Joshi A. J. Mater. Res. 1990, 5(11):2356.
64. Sato F., Saito N., Hirano Y., Jayatissa A.H., Takizawa K., Kavado S., Kato T., Sugiyama H., Ando M. J. Vac. Sci. Technol. 1998, 16(4):2553.
65. Borroni-Bird C.E., King D.A. Rev. Sci. Instrum. 1991, 62(9):2177.
66. Neuville S. SNB 2007, 121(2):436.
67. Haken U., Hundhausen M., Ley L. Appl. Phys. Lett. 1993, 63(22):3066.
68. Spitzin B.V., Bouilov L.L., Derjaguin B.V. J. Cryst. Growth 1981, 52:219.
69. Lifshitz Y., Kasi S.R., Rabalais J.W. Phys. Rev. Lett. 1989, 62:1290.
70. Kitihama K., Hirata K., Nakamatsu H., Kawai S., Fujimori N., Imai T. Photon, Beam and Plasma stimulated Chemical Processes at Surfaces. Mater. Res.Soc. Symp. Proc. 75, Pittsburgh, PA 1987, 309. V.M. Donnelly, L.P. Herman, M. Hirtose (Eds.).
71. Celii F.G., Nelson H.H., Pherson P.E. J. Mater. Res. 1990, 5(11):2337.
72. Kamo A., Audo T., Sato Y., Bando K., Ishikawa J. Diamond Relat. Mater. 1992, 1:104.
73. A. Ricard, Reactive Plasmas, (1996) Edited by SFV, 17 Rue du Renard 75004 Paris (France).
74. Beckmann R., Kulish W., Renck H.J.F., Kassing R. Diamond Relat. Mater. 1992, 1:164.
75. Bachmann P.K., Leers D., Lydtin H. Diamond Relat. Mater. 1990, 1:1.
76. McKenzie D.R., Müller D., Pailthorpe B.A., Wang Z., Kravtchinskaia E., Segal D., Lukins P.B., Swift P., Martin P.J., Amaratunga G., Gaskell P.H., Saeed A. Diamond Relat. Mater. 1991, 1:5.
77. Andre B., Rossi F. CIP, Le Vide et les couches minces by SFV, Paris (France) 1991, 256:3.
78. Robertson J. Diamond Relat. Mater. 1994, 3:361.
79. Ishikawa J., Takeiri Y., Ogawa K., Tagaki T. J. Appl. Phys. 1987, 61:2509.
80. Muranaka Y., Yamashita H., Sato K., Myadera H. J. Appl. Phys. 1990, 76(10):6246.
81. Liou Y., Inspektor A., Weimer R., Knight D., Messier R. Mater.Res. 1990, 5(11):205.
82. Frenklach M. J. Appl. Phys. 1989, 65:5142.
83. Tolstogouzov A., Daolio S., Pagura C. Surf. Sci. 1999, 441:212.
84. Sigmund P. Phys. Rev. 1969, 187:768.
85. S. Neuville, A. Taggliaferro, Y. Bounouh, S. Vallon, R. Etemadi, J. Perrin, in: SFV (Ed.), Proceedings of CIP 95 Antibes Le Vide, Sciences, Techniques et Applications Société Française du Vide, 12 rue du Renard. Paris (France), Vol. 275, 1995, p. 64.
86. Hirvonen J.P., Koskinen J., Lappalainen R., Antilla Mat A. Sci. Forum 1990, 52:197.
87. Koponen I., Hakrovrta M., Lappalainen R. J. App. Phys. 1995, 78(9):5837.
88. Kalish R. EMRS Meeting XVII, Les Editions de la Physique, les Ulis France 1987, 323.
89. C. Godet, N.M.J. Conway, B. Equer, Vide, Procédés Plasmas froids N°303, Vol.1/4 (2002) °49. Edited by Société Française du Vide, Paris.
90. Groning O., Kuttel O.M., Schaller E., Groning P., Schlapbach L. Appl. Phys. Lett. 1996, 69(18):476.
91. Shih H.C., Sung C.P., Lee C.K., Fan W.L., Chen J.G. Diamond Relat. Mater. 1992, 1:605.
92. Sung C.P., Shih H.C., Chen J.G., Tang Y.S., Fan W.L. Diamond Relat. Mater. 1992, 1:492.
93. Matsumoto O., Katagiri T. Thin Solid Films 1987, 146:283.
94. Sönderby S., Berthelsen A.N., Almtoft K.P., Christensen B.H., Nielsen L.P., Böttiger J. Diamond Relat. Mater. 2011, 20(5-6):682.
95. Patterson D.E., Chu C.J., Bai B.J., Xiao Z.I., Komplin N.J., Hauge R.H., Margrave J.L. Diamond Relat. Mater. 1992, 1:768.
96. Avigal Y. Diamond Relat. Mater. 1992, 1:216.
97. Polini R., Gazzoli D., Molinari E., Seesa V., Terranova M.L., Ascarelli P., Fontana S. Diamond Relat. Mater. 1992, 1:25.
98. Meyer D.C., Dillon R.O., William J.A. J. Vac. Sci. Technol. 1989, A7:2325.
99. Hernberg R., Lepistö T., Mantyla T., Sternberg T., Vaittulainen J. Diamond Relat. Mater. 1992, 1:255.
100. Lusvardi V.S., Pierce K.G., Barteau M.A. J. Vac. Sci. Technol. A 1997, 15(3):357.
101. Brower W.E., Bauer R.A., Sbrockey N.M. Diamond Relat. Mater. 1992, 1:859.
102. Inuzuka T., Koizuma S. Diamond Relat. Mater. 1992, 1:175.
103. K. Kobashi, K. Nimishura, K. Miyata, Y. Kawate, J.T. Glass, B.C. Willians, in: A. Feldmann, S. Holly (Eds.), Proceedings on Diamond Optics SPIE Conference, Society of Photo-Optical instrumentation Engineers, San Diego CA, Vol. 969, 1988, p. 159.
104. Neuville S. Diamond Relat. Mater. 2002, 11:1721.
105. Hintermann H.E., Chattopadhyay A.K. Diamond Relat. Mater. 1992, 1:1131.
106. Montasser K., Hattori S., Morita S. J. Appl. Phys. 1985, 58:3402.
107. Garscadden A., Nagpal R. Plasma Sources Sci. Technol. 1995, 4:268.