Mechanical properties of nanocrystalline diamond films

Journal of Applied Physics

Volumn 99, Issue 12, 2006, Pages

  Shen, Z H ^a,e   Hess, P ^a   Huang, J P ^b   Lin, Y C ^b   Chen, K H ^b   Chen, L C ^c   Lin, S T ^d  

^a UNIVERSITY OF HEIDELBERG   (Germany)

^b INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^e NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; CHEMICAL VAPOR DEPOSITION; ELASTICITY; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION;

COLUMNAR-TYPE STRUCTURE; LASER-INDUCED SURFACE ACOUSTIC WAVES; MICROWAVE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION; ULTRAVIOLET-RAMAN SPECTROSCOPY;

DIAMONDS;

EID: 33745725575     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2203428     Document Type: Article

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