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Volumn 257, Issue 7, 2011, Pages 2665-2668
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Chemical and morphological difference between TiN/DLC and a-C:H/DLC grown by pulsed vacuum arc techniques
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Author keywords
a C DLC; Adherence; Morphology; Pulsed arc; TiN DLC; XPS
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Indexed keywords
AMORPHOUS CARBON;
AMORPHOUS FILMS;
ATOMIC FORCE MICROSCOPY;
CARBON FILMS;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
MIXTURES;
MORPHOLOGY;
TIN;
TITANIUM NITRIDE;
VACUUM APPLICATIONS;
VACUUM TECHNOLOGY;
A-C/DLC;
ADHERENCE;
AMORPHOUS HYDROGENATED CARBON (A-C:H);
FOURIER TRANSFORM INFRA RED (FTIR) SPECTROSCOPY;
LATERAL FORCE MICROSCOPY;
MORPHOLOGIC CHARACTERISTICS;
PULSED ARC;
SCANNING PROBE MICROSCOPY TECHNIQUES;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 79251593238
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2010.10.039 Document Type: Article |
Times cited : (34)
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References (29)
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