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Vacuum

Volumn 78, Issue 1, 2005, Pages 73-82

Industrially-styled room-temperature pulsed laser deposition of titanium-based coatings

(1) Lackner, Juergen M a

a JOANNEUM RESEARCH (Austria)

Author keywords

Laser ablation; PLD; Pulsed laser deposition; Ti; TiCN; TiN; TiO2

Indexed keywords

AMORPHOUS MATERIALS; COATING TECHNIQUES; DEPOSITION; INTERFACES (MATERIALS); LASER ABLATION; PHYSICAL VAPOR DEPOSITION; TEMPERATURE MEASUREMENT; TITANIUM; TITANIUM DIOXIDE; TITANIUM NITRIDE;

FILM STRUCTURES; MICRO-ELECTRONICAL APPLICATIONS; TEMPERATURE-SENSITIVE MATERIALS; TICN;

PULSED LASER DEPOSITION;

EID: 14644412439 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2004.12.017 Document Type: Article

Times cited : (21)

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