Characterization of Ti-containing amorphous carbon films prepared on titanium substrates

Journal of Materials Science

Volumn 38, Issue 3, 2003, Pages 421-425

  Sheeja, D ^a   Tay, B K ^a   Sun, C Q ^a   Fu, Y Q ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHARACTERIZATION; COMPRESSIVE STRESS; CRYSTAL MICROSTRUCTURE; CRYSTALLOGRAPHY; ELECTRIC PROPERTIES; IONS; MECHANICAL PROPERTIES; MORPHOLOGY; PLASMAS; SUBSTRATES; TITANIUM;

AMORPHOUS CARBON FILMS; FILTERED CATHODIC VACUUM ARC TECHNIQUE; MICRO SCRATCH TESTER; PIN ON DISK TRIBOMETER;

CARBON;

EID: 0037331781     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1021807312324     Document Type: Article

References (21)

1. P. J. MARTIN and A. BENDAVID, Thin Solid Films 394 (2001) 1.
2. X. SHI, B. K. TAY, D. I. FLYNN and Z. SUN, Mat. Res. Soc. Symp. Proc., Materials Research Society 436 (1997) 293.
3. S. ANDERS, D. L. CALLAHAN, G. M. PHARR, T. Y. TSUI and C. S. BHATIA, Surface and Coating Technology 94/95 (1997) 189.
4. G. M. PHARR, D. L. CALLAHAN, S. D. MCADAMS, T. Y. TSUI, S. ANDERS, A. ANDERS, J. W. AGER III, I. G. BROWN, C. S. BHATIA, S. R. P. SILVA and J. ROBERTSON, Appl. Phys. Lett. 68 (1996) 779.
5. IAN G. BROWN, Annu. Rev. Mater. Sci. 28 (1998) 243.
6. T. A. FRIEDMAN, J. P. SULLIVAN, J. A. KNAPP et al., Appl. Phys. Lett. 71(26) (1997) 3820.
7. S. ANDERS, J. DIAZ, J. W. AGER III, R. Y. LO and D. B. BOGY, ibid. 71/23 (1997) 3367.
8. O. R. MONTEIRO, J. W. AGER III, D. H. LEE, R. YU LO, K. C. WALTER and M. NASTASI, J. Appl. Phys. 88(5) (2000) 2395.
9. B. K. TAY, Y. H. CHENG, X. Z. DING, S. P. LAU, X. SHI, G. F. YOU, D. SHEEJA, Diamond and Related Materials 10(3-7) (2001) 1082.
10. A. A. VOEVODIN, S. V. PRASAD and J. S. ZABINSKI, J. Appl. Phys. 82(2) (1997) 855.
11. D. SHEEJA, B. K. TAY, S. P. LAU and XU SHI, Wear 249 (2001) 433.
12. D. SHEEJA, B. K. TAY, X. SHI, S. P. LAU, C. DANIEL, S. M. KRISHNAN and L. N. NUNG, Diamond and Related Materials 10(3-7) (2001) 1043.
13. SHI XU, B. K. TAY, H. S. TAN, LI ZHONG, Y. Q. TU, S. R. P. SILVA and W. I. MILNE, J. Appl. Phy. 79(9) (1996) 7234.
14. S. PRAWER, K. W. NUGENT, Y. LIFSHITZ, G. D. LEMPERT, E. GROSSMAN, J. KULIK, I. AVIGAL and R. KALISH, Diamond and related materials 5 (1996) 433.
15. B. K. TAY, X. SHI, H. S. TAN, H. S. YANG and Z. SUN, Surface and Coatings Technology 105 (1998) 155.
16. J. R. SHI, X. SHI, Z. SUN, E. LIU, B. K. TAY and S. P. LAU, Thin solid films 366 (2000) 169.
17. M. A TAMOR and W. C VASSELL, J. Appl. Phys. 76(6) (1994) 3823.
18. J. SCHWAN, S. ULRICH, V. BATORI, H. EHRHARDT and S. R. P. SILVA, ibid. 80(1) (1996) 440.
19. X. DING, Y. J. LI, Z. SUN, B. K. TAY, S. P. LAU, G. Y. CHEN, W. Y. CHEUNG and S. P. WONG, Jl. of Applied Physics 88(11) (2000) 6842.
20. B. D. CULLITY and S. R. STOCK, "Elements of X-Ray Diffraction" (Prentice-Hall, Upper Saddle River, New Jersey, 2001).
21. K. HOLMBERG and A. MATTHEWS, "Tribology Series," edited by D. Dowson (Elsevier Science B. V., Amsterdam, 1994) p. 279.