The investigation of thermal effect on the properties of pulsed laser deposited diamond-like carbon films

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 103-108

  Jung, Hae Suk ^a   Park, Hyung Ho ^a   Pang, Seong Sik ^a   Lee, Sang Yeol ^a  

^a Yonsei University   (South Korea)

Author keywords

Carbon bond ratio; Diamond like carbon (DLC); Pulsed laser deposition (PLD); Sp3 sp2

Indexed keywords

ANNEALING; CARBON; CHEMICAL BONDS; DENSITY (SPECIFIC GRAVITY); DEPOSITION; MICROSTRUCTURE; MORPHOLOGY; PHOTOMULTIPLIERS; PULSED LASER APPLICATIONS; SILICON WAFERS; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

DIAMOND LIKE CARBON (DLC) FILMS; PULSED LASER DEPOSITION;

AMORPHOUS FILMS;

EID: 0032476367     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01206-1     Document Type: Article

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